Comb sense microphone

• US 7,545,945 B2
• Filed: 08/05/2005
• Issued: 06/09/2009
• Est. Priority Date: 08/05/2005
• Status: Expired due to Fees

• Current Assignee: The Research Foundation for The State University of New York (State University of New York)
• Original Assignee: The Research Foundation for The State University of New York (State University of New York)
• Inventors: Miles, Ronald
• Primary Examiner(s): Ni; Suhan
• Application Number:
  US11/198,370
• Publication Number:
  US 20070297631A1
• Time in Patent Office: 1,404 Days
• Field of Search: 381/171, 381173-178, 381181-182, 381190-191, 381/427, 381/431
• US Class Current: 381/174
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence

Abstract

There is provided a rigid hinged substrate, which forms a diaphragm for miniature microphones. A series of fingers disposed radially around the perimeter of the diaphragm interacts with mating fingers disposed adjacent the diaphragm with a small gap in between. The fingers are interdigitated. The movement of the diaphragm fingers relative to the fixed fingers varies the capacitance, thereby allowing creation of an electrical signal responsive to varying sound pressure at the diaphragm. Because the fingers may be formed with great stiffness, the classic problem in typical capacitive microphones of attraction of the diaphragm to the back plate is effectively overcome. The multiple fingers allow the creation of a microphone having a high output voltage relative to conventional microphones. This yields a very low noise microphone. The diaphragm may be readily formed using well known silicon microfabrication techniques so as to reduce manufacturing costs.

Claims

1. A miniature microphone, comprising:

a) a diaphragm comprising a thin, rigid substrate having a pair of opposing surfaces and a perimeter;

b) a resilient attachment attached to said diaphragm;

c) a plurality of fingers rigidly attached to said diaphragm and projecting outward from said perimeter;

d) a structure surrounding said diaphragm and having a plurality of fixed fingers disposed in a spaced apart, interdigitated relationship with said plurality of fingers of said diaphragm;

e) a sensor adapted to produce an output signal responsive to a relative movement of said diaphragm and said structure.

2. A diaphragm for use in a miniature microphone, comprising:

a) a thin, rigid, substrate having a perimeter; and

b) a first plurality of fingers rigidly attached to said substrate and projecting outwardly from said perimeter, said first plurality of fingers being adapted for interaction with a corresponding second plurality of fixed fingers disposed external to said substrate and proximate said first plurality of fingers.

3. The diaphragm for use in a miniature microphone as recited in claim 2, further comprising:

c) a resilient attachment disposed between a point along said perimeter.

4. The diaphragm for use in a miniature microphone as recited in claim 3, wherein said first plurality of fingers project radially from said perimeter with respect to a predetermined point on one of said opposing surfaces of said substrate.

5. The diaphragm for use in a miniature microphone as recited in claim 4, wherein said predetermined point on said substrate is a point which remains substantially fixed relative to said second plurality of fixed fingers during said movement.

6. The diaphragm for use in a miniature microphone as recited in claim 5, wherein said predetermined point on said substrate comprises a geometric center of said substrate.

7. The diaphragm for use in a miniature microphone as recited in claim 2, further comprising a supporting structure adapted to resiliently support said substrate for movement in response to acoustic waves with respect to said second plurality of fixed fingers, comprising at least one of:

a hinge affixed to said substrate at a predetermined point on said perimeter,

a spring attached to said substrate, and

a resilient pad supporting at least a portion of said substrate.

8. The diaphragm for use in a miniature microphone as recited in claim 3, wherein said resilient attachment point comprises a pair of hinge attachment points, each being disposed along said perimeter.

9. The diaphragm for use in a miniature microphone as recited in claim 3, wherein said first plurality of fingers projects from only a portion of said perimeter.

10. The diaphragm for use in a miniature microphone as recited in claim 3, further comprising:

d) a rib structure disposed on a flat surface of said substrate.

11. The diaphragm for use in a miniature microphone as recited in claim 3, wherein said diaphragm is substantially rectangular.

12. The diaphragm for use in a miniature microphone as recited in claim 2, further comprising a resilient support for supporting said substrate with respect to said second plurality of fixed fingers, and an electrostatic sensor adapted to produce a signal responsive to a movement of said first plurality of fingers with respect to said second plurality of fixed fingers, and wherein said electrostatic sensor operates substantially without inducing a force inducing displacement of said substrate with respect to said second plurality of fixed fingers.

13. The diaphragm for use in a miniature microphone as recited in claim 3, further comprising a structure surrounding said diaphragm and having the second plurality of fixed fingers disposed thereon, in a spaced apart, interdigitated relationship with said first plurality of fingers.

14. The diaphragm for use in a miniature microphone as recited in claim 13, further comprising a sensor adapted to produce an output signal responsive to a relative movement of first plurality of fingers with respect to said second plurality of fixed fingers.

15. The diaphragm for use in a miniature microphone as recited in claim 2, wherein said diaphragm is supported for movement in response to acoustic waves with respect to a fixed structure supporting the second plurality of fixed fingers, to thereby change an electrical capacitance between the first plurality of fingers and the second fixed plurality of fingers.

16. The diaphragm for use in a miniature microphone as recited in claim 2, further comprising an amplifier adapted to produce an electronic signal in response to movement of said diaphragm with respect to the second plurality of fixed fingers.

17. The diaphragm for use in a miniature microphone as recited in claim 16, wherein at least a portion of said diaphragm, and said second plurality of fixed fingers are conductive, and are provided with electrical connections adapted to maintain a bias voltage therebetween.

18. The diaphragm for use in a miniature microphone as recited in claim 2, wherein said diaphragm is supported for movement in response to acoustic waves with respect to a fixed structure supporting the second plurality of fixed fingers, further comprising an optical interferometer adapted to generate a signal representative of the movement of said diaphragm.