Mounting structure of angular rate sensor
First Claim
1. A mounting structure comprising:
- a sensor; and
a mounting board for mounting the sensor thereon, whereinthe sensor includes a pair of vibrators capable of vibrating in a first direction,each sensor detects an angular velocity on the basis of vibration of the vibrator in a second direction in a case where the vibrator is vibrated in the first direction, and where the angular velocity is applied to the sensor in a third direction so that the third direction provides a rotation axis of the angular velocity,the vibrators of the pair of vibrators vibrate in phases that are opposite to one another;
the second direction is perpendicular to the first direction,the third direction is perpendicular to both of the first and the second directions,the third direction is in parallel to a horizontal plane perpendicular to a gravitational direction, andthe first direction is in parallel to the horizontal plane.
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Abstract
An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.
16 Citations
7 Claims
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1. A mounting structure comprising:
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a sensor; and a mounting board for mounting the sensor thereon, wherein the sensor includes a pair of vibrators capable of vibrating in a first direction, each sensor detects an angular velocity on the basis of vibration of the vibrator in a second direction in a case where the vibrator is vibrated in the first direction, and where the angular velocity is applied to the sensor in a third direction so that the third direction provides a rotation axis of the angular velocity, the vibrators of the pair of vibrators vibrate in phases that are opposite to one another; the second direction is perpendicular to the first direction, the third direction is perpendicular to both of the first and the second directions, the third direction is in parallel to a horizontal plane perpendicular to a gravitational direction, and the first direction is in parallel to the horizontal plane. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification