O-ring-less low profile fittings and fitting assemblies
First Claim
1. An o-ring-less low profile fitting assembly, comprising:
- an o-ring-less low profile fitting having a first end and a second end, wherein said first end of said o-ring-less low profile fitting has a rim, wherein said rim is deformable, wherein said o-ring-less low profile fitting is made of a single piece of material; and
a low profile locking nut pressing down said o-ring-less low profile fitting into a recess area inside a receiving hole machined out of a manifold and deforming said rim of said first end to complete a seal between said o-ring-less low profile fitting and said manifold, wherein said first end of said o-ring-less low profile fitting is structured to mate with said recess area inside said receiving hole, wherein said manifold is made of a first material, wherein said o-ring-less low profile fitting is made of a second material, wherein said second material has higher compressibility than said first material, wherein said low profile locking nut has a first end, a second end, and a male threaded portion, and wherein said male threaded portion of said low profile locking nut is structured to mate with a female threaded portion of said receiving hole.
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Accused Products
Abstract
Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises an o-ring-less low profile fitting and a low profile male threaded locking nut. A manifold of the pump is machined with a female threaded hole for receiving the fitting and the locking nut. The fitting has higher compressibility than the manifold. Initially, as one end of the fitting touches the bottom of the receiving hole, there is a small gap between the end of the fitting and the bottom of the receiving hole. As the fitting is pressed down, the end of the fitting that touches the bottom of the receiving hole begins to deform and fill the small gap, thus creating a tight seal between the fitting and the manifold.
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Citations
18 Claims
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1. An o-ring-less low profile fitting assembly, comprising:
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an o-ring-less low profile fitting having a first end and a second end, wherein said first end of said o-ring-less low profile fitting has a rim, wherein said rim is deformable, wherein said o-ring-less low profile fitting is made of a single piece of material; and a low profile locking nut pressing down said o-ring-less low profile fitting into a recess area inside a receiving hole machined out of a manifold and deforming said rim of said first end to complete a seal between said o-ring-less low profile fitting and said manifold, wherein said first end of said o-ring-less low profile fitting is structured to mate with said recess area inside said receiving hole, wherein said manifold is made of a first material, wherein said o-ring-less low profile fitting is made of a second material, wherein said second material has higher compressibility than said first material, wherein said low profile locking nut has a first end, a second end, and a male threaded portion, and wherein said male threaded portion of said low profile locking nut is structured to mate with a female threaded portion of said receiving hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An o-ring-less low profile fitting, comprising:
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a thru hole; a first end having a rim having a first inner diameter, wherein said rim is deformable and wherein said thru hole has a second inner diameter; a fitting seal surface defined by said first inner diameter of said rim and said second diameter of said thru hole, wherein said fitting seal surface slopes from said rim to said thru hole; and a first protuberance supporting said fitting seal surface and having a first outer diameter; a second protuberance supporting said second end and having a second outer diameter, wherein said second outer diameter is structured to pass through a bore of a low profile locking nut and wherein said first-protuberance is structured to abut a portion of said low profile locking nut. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification