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Sensor array integrated electrochemical chip, method of forming same, and electrode coating

  • US 7,547,381 B2
  • Filed: 09/26/2003
  • Issued: 06/16/2009
  • Est. Priority Date: 09/26/2003
  • Status: Expired due to Fees
First Claim
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1. A method of forming an electrochemical chip, comprising:

  • forming a first plate by;

    depositing a conducting layer on a first support; and

    etching said conducting layer to form an electrode array;

    covering at least one electrode of said electrode array with a coating doped with a ferrocene compound;

    irreversibly oxidizing said ferrocene compound during said forming said electrochemical chip;

    forming a second plate by;

    etching an opening in a second support;

    bonding said second plate to said first plate such that said first plate and said second plate define a cavity, with said electrode array being within said cavity.

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