UV assisted thermal processing

• US 7,547,633 B2
• Filed: 05/01/2006
• Issued: 06/16/2009
• Est. Priority Date: 05/01/2006
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yokota, Yoshitaka, Ranish, Joseph Michael
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US11/414,869
• Publication Number:
  US 20080067416A1
• Time in Patent Office: 1,142 Days
• Field of Search: 438/687, 438/677, 438/778, 438/786, 438/796, 427/582, 427/583
• US Class Current: 438/687
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

The present invention provides methods and apparatus for performing thermal processes to a semiconductor substrate. Thermal processing chambers of the present invention comprise two different energy sources, such as an infrared radiation source and a UV radiation source. The UV radiation source and the infrared radiation source may be used alone or in combination to supply heat, activate electronic, or create active species inside the thermal processing chamber.

Claims

1. An apparatus for thermal processing a substrate, comprising:

a chamber;

a UV radiation assembly disposed inside the chamber; and

an outside radiation assembly configured to radiate energy into the chamber through a quartz window on the chamber.

2. The apparatus of claim 1, wherein the outside radiation assembly comprises a plurality of infrared radiation sources arranged in a hexagonal arrangement.

3. The apparatus of claim 1, wherein the UV radiation assembly comprises a plurality of UV lamps.

4. The apparatus of claim 3, wherein each of the plurality of UV lamps is enclosed in a quartz pipe.

5. The apparatus of claim 3, wherein the plurality of UV lamps are parallel to one another and are evenly distributed above a processing surface of the substrate.

6. The apparatus of claim 3, wherein electrodes of the plurality of UV lamps are disposed outside the chamber.

7. The apparatus of claim 3, wherein the plurality of UV lamps are arranged along a polygon surrounding a processing surface of the substrate.

8. The apparatus of claim 7, wherein the UV radiation assembly further comprises a plurality of reflectors, and each of the plurality of reflectors is configured to reflect UV radiation from a corresponding UV lamp substantially parallel to the substrate.

9. The apparatus of claim 8, wherein the plurality of reflectors having a parabolic cross section with the corresponding UV lamp positioned in a focus of the parabolic cross section.

10. An apparatus for thermal processing a substrate, comprising:

a chamber having a top window;

a substrate support mounted inside the chamber, wherein the substrate support is configured to support the substrate with a processing surface facing the top window;

a first energy assembly disposed outside the chamber, wherein the first energy assembly is configured to radiate energy through the top window; and

a second energy assembly mounted inside the chamber above the substrate support, wherein the second energy assembly is configured to provide ultra violet energy.

11. The apparatus of claim 10, wherein the second energy assembly comprises a plurality of UV lamps arranged parallel to one another.

12. The apparatus of claim 11, wherein each of the plurality of UV lamps is individually controllable.

13. The apparatus of claim 10, wherein the second energy assembly comprises a plurality of UV lamps arranged in a polygon surrounding the processing surface of the substrate.

14. The apparatus of claim 13, wherein the second energy assembly further comprises a plurality of reflectors, each of the plurality of reflectors is configured to reflect the UV radiation from a corresponding UV lamp substantially parallel to the processing surface of the substrate.

15. The apparatus of claim 10, wherein the first energy assembly comprises a plurality of lamps having a hexagonal arrangement.

16. The apparatus of claim 10, wherein the first energy assembly is configured to provide infrared energy.

17. A method for thermal processing a substrate, comprising:

positioning the substrate in a chamber;

supplying a precursor to the chamber;

applying a first energy source to supply heat to the chamber; and

applying a second energy source to generate active species from the precursor in the chamber near a surface of the substrate, wherein the first and second energy sources are applied in combination.

18. The method of claim 17, where the first energy source comprises a plurality of heating lamps and the second energy source comprises a plurality of UV lamps.

19. The method of claim 18, further comprising:

positioning the first energy source outside a quartz window of the chamber; and

positioning the second energy source inside the chamber.

20. The method of claim 17, wherein applying the second energy source comprises tailoring radiation distribution for active species generation.