Multi-axis interferometers and methods and systems using multi-axis interferometers

• US 7,548,322 B2
• Filed: 10/11/2007
• Issued: 06/16/2009
• Est. Priority Date: 01/06/2004
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A.
• Primary Examiner(s): Lee; Hwa (Andrew) S
• Application Number:
  US11/870,523
• Publication Number:
  US 20080117428A1
• Time in Patent Office: 614 Days
• Field of Search: 356/493, 356/498, 356/487, 356/486, 356/500, 356/510, 356/489, 356/495, 356/514
• US Class Current: 356/500
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02028 Two or more reference or object arms in one interferometer
• CPC Class Codes: G01B 9/02058 by particular optical compensation or alignment elements, e.g. dispersion compensation
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment

Abstract

In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.

Claims

1. A lithography system for use in fabricating integrated circuits on a substrate, the system comprising:

a stage for supporting the substrate;

an illumination system including a radiation source, a mask, a positioning system, a lens assembly;

a positioning system configured to adjust the position of the stage relative to the lens assembly; and

an interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis,

wherein at least one of the interferometer and the measurement object are attached to the stage, and the output beams each include a component that makes a pass to the measurement object along a common beam path.

2. The lithography system of claim 1, wherein the interferometer is configured to provide information about a position of the substrate within the lithography system.

3. The lithography system of claim 1, wherein the interferometer is attached to a rigid frame of the lithography system and the measurement object is attached to the stage.

4. The lithography system of claim 1, wherein at least three of the measurement axes lie in a common plane.

5. The lithography system of claim 4, wherein the at least three measurement axes are parallel.

6. The lithography system of claim 1, further comprising an electronic processing system coupled to the interferometer, wherein the electronic processing system is configured to calculate a value for a second difference parameter (SDP) for the measurement object based on distance between the interferometer and the measurement object along the three measurement axes.

7. The lithography system of claim 6, wherein the SDP is given by the expression (x₂−

x₁)−

η

(x₃−

x₂), where x_i corresponds to the distance between the interferometry system and the measurement object for the i^th measurement axis and η

is a non-zero constant.

8. The lithography system of claim 7, wherein η

is selected so that the value for the expression is not sensitive to rotation of the measurement object about an axis orthogonal to the common plane.

9. The lithography system of claim 6, wherein the electronic processor is configured to calculate a value for the SDP for each of multiple positions of the measurement object relative to the interferometer along an axis orthogonal to the measurement axes and determine information about a surface figure for the measurement object based on the multiple values.

10. The lithography system of claim 9, wherein the electronic processor is configured to monitor a position of the measurement object based on at least some of the interferometric information from the three output beams.

11. The lithography system of claim 10, wherein the electronic processor is further configured to use the information about the surface figure to improve the accuracy the monitored position.

12. The lithography system of claim 1, wherein the interferometer is further configured to produce one or more additional output beams each including interferometric information about a distance between the interferometer and the measurement object along a corresponding measurement axis, wherein the measurement axes corresponding to the additional output beams are not coplanar with the at least three measurement axes.

13. The lithography system of claim 12, wherein the measurement axes corresponding to the additional output beams are parallel to the at least three measurement axes.

14. The lithography system of claim 1, wherein the interferometer is configured to direct at least three beams to contact the measurement object at least once and combine each beam with another beam to produce the output beams.

15. The lithography system of claim 1, further comprising an electronic processor that derives information about the surface profile of the measurement object from the output beams as the measurement object is scanned relative to the interferometer along a distance nonparallel to the measurement axes.

16. The lithography system of claim 15, wherein distance over which the measurement object is scanned is orthogonal to the measurement axes.

17. A lithography system for use in fabricating integrated circuits on a substrate, the system comprising:

a stage for supporting the substrate;

an illumination system including a radiation source, a mask, a positioning system, a lens assembly;

a positioning system configured to adjust the position of the stage relative to the lens assembly; and

an interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least one of the interferometer and the measurement object are attached to the stage; and

an electronic processing system coupled to the interferometer, wherein the electronic processing system is configured to calculate a value for a second difference parameter (SDP) for the measurement object based on the distances between the interferometer and the measurement object along the at least three measurement axes.

18. The lithography system of claim 17, wherein the SDP is given by the expression (x₂−

x₁)−

η

(x₃−

x₂), where x_i corresponds to the distance between the interferometry system and the measurement object for the i^th measurement axis and η

is a non-zero constant.

19. A lithography system for use in fabricating integrated circuits on a substrate, the system comprising:

a stage for supporting the substrate;

an illumination system including a radiation source, a mask, a positioning system, a lens assembly;

a positioning system configured to adjust the position of the stage relative to the lens assembly; and

an interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least one of the interferometer and the measurement object are attached to the stage and the output beams each include a component that makes one pass to the measurement object along a common measurement beam path; and

an electronic processor configured to derive information about the surface figure profile of the measurement object from the output beams as the measurement object is scanned relative to the interferometry system along a distance non-parallel to the measurement axes.

20. The lithography system of claim 19, wherein distance over which the measurement object is scanned is orthogonal to the measurement axes.

21. The lithography system of claim 19, wherein the electronic processor is configured to monitor a position of the measurement object based on at least some of the interferometric information from the three output beams while the lithography system illuminates a substrate with imaged radiation.

22. The lithography system of claim 21, wherein the electronic processor is further configured to use the information about the surface figure profile to improve the accuracy of the monitored position.

23. A lithography method for use in fabricating integrated circuits on a substrate, the method comprising:

supporting the substrate on a moveable stage;

imaging spatially patterned radiation onto the substrate;

adjusting the position of the stage;

producing at least three output beams each including interferometric information about a distance between an interferometer and a measurement object along a corresponding measurement axis, wherein at least one of the interferometer and the measurement object are attached to the stage and the output beams each include a component that makes a pass to the measurement object along a common beam path; and

monitoring the position of the stage based on the interferometric information from at least one of the output beams.

24. The lithography method of claim 23, further comprising deriving information about the surface figure profile of the measurement object from the output beams as the measurement object is scanned relative to the interferometry system along a distance non-parallel to the measurement axes.

25. The lithography method of claim 24, further comprising using the information about the surface figure profile of the measurement object to improve the accuracy of the monitored position.

26. A method for fabricating integrated circuits, the method comprising the lithography method of claim 23.

27. A lithography method for fabricating integrated circuits on a substrate comprising:

positioning a first component of a lithography system relative to a second component of a lithography system to expose the substrate to spatially patterned radiation;

producing at least three output beams each including interferometric information about a distance between an interferometer and a measurement object along a corresponding measurement axis, wherein at least one of the interferometer and the measurement object are attached to the first component and the output beams each include a beam component that makes a pass to the measurement object along a common beam path; and

monitoring the position of the stage based on the interferometric information from at least one of the output beams.

28. The lithography method of claim 27, further comprising calculating values of a second difference parameter (SDP) for the measurement object based on the distances between the interferometer and the measurement object along the at least three measurement axes;

and

deriving information about a surface figure profile of the measurement object from calculated values of the SDP.

29. A method for fabricating integrated circuits, the method comprising the lithography method of claim 27.