Ultra-fast beam dithering with surface acoustic wave modulator

• US 7,548,364 B2
• Filed: 07/31/2006
• Issued: 06/16/2009
• Est. Priority Date: 07/31/2006
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Jennings, Dean
• Primary Examiner(s): Schwartz; Jordan M.
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US11/461,395
• Publication Number:
  US 20080024855A1
• Time in Patent Office: 1,051 Days
• Field of Search: 359/285
• US Class Current: 359/285
• CPC Class Codes: G02F 1/11 based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves acousto-optical deflection G02F1/33
• CPC Class Codes: G02F 1/125 in an optical waveguide structure
• CPC Class Codes: G02F 2203/24 beam steering

Abstract

An apparatus for processing a coherent light pulse comprises a piezoelectric material having an optical interface surface and a surface acoustic wave (SAW) producing device disposed on the piezoelectric material. A coherent light pulse is dithered at a high frequency when it is reflected off of or transmitted through the optical interface surface. The SAW-producing device may be adapted to generate a travelling SAW or a standing SAW on the optical interface surface.

Claims

1. An apparatus for processing a coherent light pulse, comprising:

a piezoelectric material having an optical interface surface that comprises a substantially light-reflecting surface; and

a surface acoustic wave (SAW) producing device disposed on the piezoelectric material for producing a SAW that alters the characteristics of light incident on the optical interface surface, wherein the SAW-producing device comprises an interdigital transducer (IDT) mounted on the piezoelectric material and proximate the light-reflecting surface, the IDT having;

an electrode disposed on a first edge of the light-reflecting surface;

a reflector disposed on a second edge of the light-reflecting surface, wherein the reflector is opposite and substantially parallel to the electrode; and

a spacing between the electrode and the reflector selected to produce a standing SAW on the light-reflecting surface between the electrode and the reflector.

2. The apparatus of claim 1, wherein the IDT further comprises:

a second electrode disposed on a third edge of the light-reflecting surface;

a second reflector disposed on a fourth edge of the light-reflecting surface, wherein the second reflector is opposite and substantially parallel to the second electrode; and

a second spacing between the second electrode and the second reflector selected to produce a standing SAW on the light-reflecting surface between the second electrode and the second reflector.

3. The apparatus of claim 1 further comprising:

as dove prism mounted on the light-reflecting surface, wherein an internal reflective surface of the dove prism is in direct contact with the light-reflecting surface.

4. The apparatus of claim 3, wherein the dove prism comprises an optical material that has an index of refraction that is substantially the same as an index of refraction of the piezoelectric material.

5. The apparatus of claim 4, wherein the piezoelectric material comprises crystalline quartz and the dove prism comprises fused silica.

6. An apparatus for processing a coherent light pulse, comprising:

a piezoelectric material having an optical interface surface that comprises a substantially light-reflecting surface;

a first surface acoustic wave (SAW) producing device disposed on the piezoelectric material for producing a first SAW that alters the characteristics of light incident on the optical interface surface, wherein the SAW-producing device comprises an interdigital transducer (IDT) mounted on the piezoelectric material and proximate the light-reflecting surface, the IDT having;

an electrode disposed on a first edge of the light-reflecting surface;

a reflector disposed on a second edge of the light-reflecting surface, wherein the reflector is opposite and substantially parallel to the electrode; and

a spacing between the electrode and the reflector selected to produce a standing SAW on the light-reflecting surface between the electrode and the reflector; and

a second SAW-producing device disposed on the piezoelectric material and configured to produce a second SAW along an axis of transmission that is not aligned with an axis of transmission of the first SAW-producing device.

7. An apparatus for processing a coherent light pulse, comprising:

a piezoelectric material having an optical interface surface that comprises a substantially light-transmitting surface;

a surface acoustic wave (SAW) producing device disposed on the piezoelectric material for producing a SAW that alters the characteristics of light incident on the optical interface surface;

a highly reflective surface oriented substantially parallel to the light-transmitting surface;

a quarter wave plate having a first surface and positioned substantially parallel to the light-transmitting surface; and

a polarizing cube beam splitter configured to direct a coherent light pulse through the quarter wave plate at an angle normal to the first surface, through the light-transmitting surface, and onto the highly reflective surface.

8. The apparatus of claim 7, wherein the SAW-producing device comprises:

an IDT mounted on the piezoelectric material and proximate the light-transmitting surface.

9. The apparatus of claim 8, wherein the piezoelectric material has a second surface opposite the light-transmitting surface, wherein the second surface comprises an anti-reflective coating.

10. The apparatus of claim 8, wherein the IDT is oriented to propagate a SAW across the light-transmitting surface.

11. The apparatus of claim 8, wherein the IDT comprises:

an electrode disposed on a first edge of the light-transmitting surface;

a reflector disposed on a second edge of the light-transmitting surface, wherein the reflector is opposite and substantially parallel to the electrode; and

a spacing between the electrode and the reflector selected to produce a standing SAW on the light-transmitting surface between the electrode and the reflector.

12. The apparatus of claim 11, wherein the IDT further comprises:

a second electrode disposed on a third edge of the light-transmitting surface;

a second reflector disposed on a fourth edge of the light-transmitting surface, wherein the second reflector is opposite and substantially parallel to the second electrode; and

a second spacing between the second electrode and the second reflector, selected to produce a standing SAW on the light-transmitting surface between the second electrode and the second reflector.

13. An apparatus for processing a substrate, comprising:

a substrate support configured to position a substrate in the path of a pulse of coherent light;

a piezoelectric material having an optical interface surface;

a surface acoustic wave (SAW) producing device disposed on the optical interface surface for producing a SAW that alters the characteristics of light incident on the optical interface surface;

a coherent light source arranged to direct a pulse of coherent light on the optical interface surface; and

projection optics configured to direct the pulse of coherent light from the optical interface surface to the substrate

wherein at least one of the substrate support, the projection optics, or the optical interface surface is configured to provide relative motion between the pulse of coherent light and the substrate.