Method and system for maintaining partial vacuum in display device
First Claim
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1. A display device, comprising:
- a substrate configured to transmit light therethrough;
a modulating means for modulating light transmitted through the substrate, wherein the modulating means is formed on the substrate and has a first cavity therein, wherein the first cavity has a gas pressure less than atmospheric pressure;
a backplate sealed to the substrate to form a package; and
a vacuum housing configured to hold the package,wherein the housing connects to a vacuum device,wherein the vacuum device generates at least a partial vacuum within a second cavity between the housing and the package to lower gas pressure within the first cavity in the modulating means, andwherein a valve is disposed between the first cavity and the second cavity.
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Abstract
The time required for an interferometric modulator to switch from a state with a collapsed cavity to a state with an open cavity or vice versa, i.e., the switch time, is decreased by decreasing the viscosity of the gas filling the cavity. The viscosity is decreased by forming at least a partial vacuum in the cavity. The partial vacuum is formed, in turn, by forming a cavity in a housing holding the interferometric modulator. The vacuum can be generated by a vacuum pump. By decreasing the switch time, interferometric modulators in an array of interferometric modulators can be switched more quickly, thereby advantageously increasing the refresh rate for a display using the array.
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Citations
23 Claims
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1. A display device, comprising:
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a substrate configured to transmit light therethrough; a modulating means for modulating light transmitted through the substrate, wherein the modulating means is formed on the substrate and has a first cavity therein, wherein the first cavity has a gas pressure less than atmospheric pressure; a backplate sealed to the substrate to form a package; and a vacuum housing configured to hold the package, wherein the housing connects to a vacuum device, wherein the vacuum device generates at least a partial vacuum within a second cavity between the housing and the package to lower gas pressure within the first cavity in the modulating means, and wherein a valve is disposed between the first cavity and the second cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A display device, comprising:
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a substrate configured to transmit light therethrough; a modulating means for modulating light transmitted through the substrate, wherein the modulating means is formed on the substrate and has a first cavity therein, wherein the first cavity has a gas pressure less than atmospheric pressure; and a backplate sealed to the substrate to form a package, the backplane comprising at least one valve, wherein the at least one valve reduces gas pressure in the first cavity when engaged with a partial vacuum on an outside of the backplate, and wherein the at least one valve seals the first cavity at the gas pressure less than atmospheric pressure. - View Dependent Claims (20, 21, 22, 23)
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Specification