X-ray inspection based on scatter detection
First Claim
1. An inspection system for inspecting an object, the system comprising:
- a source of penetrating radiation, disposed with respect to the object such that the inspected field of view is less than 0.1 steradians;
a spatial modulator for forming the penetrating radiation into a beam for irradiating an object with a scanning profile;
a detector for detecting scattered radiation from the object, separated from the source of penetrating radiation, and disposed, with respect to the object, such as to subtend greater than 0.5 steradians in a field of view of the object.
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Accused Products
Abstract
Systems and methods for inspecting an object with a scanned beam of penetrating radiation are disclosed. Scattered radiation from the beam is detected, in either the backward or forward direction. Characteristic values of the backscattered radiation are compared to expected reference values to characterize the object. Additionally, penetrating radiation transmitted through the inspected object may be combined with scatter information. In certain embodiments, the inspected field of view is less than 0.1 steradians, and the detector is separate from the source of penetrating radiation and is disposed, with respect to the object, such as to subtend greater than 0.5 steradians in the field of view of the object.
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Citations
18 Claims
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1. An inspection system for inspecting an object, the system comprising:
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a source of penetrating radiation, disposed with respect to the object such that the inspected field of view is less than 0.1 steradians; a spatial modulator for forming the penetrating radiation into a beam for irradiating an object with a scanning profile; a detector for detecting scattered radiation from the object, separated from the source of penetrating radiation, and disposed, with respect to the object, such as to subtend greater than 0.5 steradians in a field of view of the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification