Force sensing integrated readout and active tip based probe microscope systems

• US 7,552,625 B2
• Filed: 04/06/2006
• Issued: 06/30/2009
• Est. Priority Date: 06/17/2005
• Status: Expired due to Fees

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, Fahrettin Levent
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/398,650
• Publication Number:
  US 20060283338A1
• Time in Patent Office: 1,181 Days
• Field of Search: 731/05, 250/306, 250/307
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

Claims

1. A microscopy probe unit, comprising:

a. an optically transparent substrate;

b. an optical diffraction grating disposed on the transparent substrate;

c. a flexible mechanical structure spaced apart from the transparent substrate, the flexible mechanical structure including a reflective surface;

d. a probe tip extending outwardly from the flexible mechanical structure;

e. a light source configured to direct a light beam toward the reflective surface so that the light beam is between 0° and

30°

away from normal to the reflective surface;

f. at least two optical sensors, including a first optical sensor and a spaced apart second optical sensor, the first optical sensor configured to sense a first intensity of a beam of a first diffraction order diffracted by the diffraction grating and the second optical sensor configured to sense a second intensity of a beam of a second diffraction order, different from the first diffraction order, diffracted by the diffraction grating, wherein the first intensity and the second intensity are indicative of a displacement between the optical diffraction grating and the reflective surface;

g. a first electrical connection coupled to the detection surface and a second electrical connection coupled to the flexible mechanical structure, the first electrical connection and the second electrical connection being configured to supply electrostatic forces to actuate the flexible mechanical structure; and

h. an actuator configured to drive the first electrical connection and the second electrical connection with an oscillating signal so as to cause the flexible mechanical structure to operate in a tapping mode.

2. The microscopy probe unit according to claim 1, wherein the probe unit is configured to be positioned at a predetermined location on a microscopy system.

3. The microscopy probe unit according to claim 2, wherein the probe unit is configured to be aligned to the predetermined location based on an alignment structure.

4. The microscopy probe unit according to claim 1, further comprising:

a first electrical connection coupled to the grating; and

a second electrical connection coupled to the flexible mechanical structure.

5. The microscopy probe unit according to claim 4, wherein the first electrical connection and the second electrical connection are configured to supply electrostatic forces to actuate the flexible mechanical structure.

6. The microscopy probe unit according to claim 1, further comprising:

a rigid mechanical structure, wherein the optically transparent substrate is coupled to the rigid mechanical structure.

7. The microscopy probe unit according to claim 6, wherein the substrate and a portion of the rigid mechanical structure are transparent to light emitted by the light source.

8. The microscopy probe unit according to claim 6, wherein the light source is positioned on the rigid mechanical structure to provide a direct optical path from the light source to the grating.

9. The microscopy probe unit of claim 1, wherein the oscillating signal comprises a sinusoidal signal.