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Force sensing integrated readout and active tip based probe microscope systems

  • US 7,552,625 B2
  • Filed: 04/06/2006
  • Issued: 06/30/2009
  • Est. Priority Date: 06/17/2005
  • Status: Expired due to Fees
First Claim
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1. A microscopy probe unit, comprising:

  • a. an optically transparent substrate;

    b. an optical diffraction grating disposed on the transparent substrate;

    c. a flexible mechanical structure spaced apart from the transparent substrate, the flexible mechanical structure including a reflective surface;

    d. a probe tip extending outwardly from the flexible mechanical structure;

    e. a light source configured to direct a light beam toward the reflective surface so that the light beam is between 0° and

    30°

    away from normal to the reflective surface;

    f. at least two optical sensors, including a first optical sensor and a spaced apart second optical sensor, the first optical sensor configured to sense a first intensity of a beam of a first diffraction order diffracted by the diffraction grating and the second optical sensor configured to sense a second intensity of a beam of a second diffraction order, different from the first diffraction order, diffracted by the diffraction grating, wherein the first intensity and the second intensity are indicative of a displacement between the optical diffraction grating and the reflective surface;

    g. a first electrical connection coupled to the detection surface and a second electrical connection coupled to the flexible mechanical structure, the first electrical connection and the second electrical connection being configured to supply electrostatic forces to actuate the flexible mechanical structure; and

    h. an actuator configured to drive the first electrical connection and the second electrical connection with an oscillating signal so as to cause the flexible mechanical structure to operate in a tapping mode.

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