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Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

  • US 7,554,094 B2
  • Filed: 06/13/2007
  • Issued: 06/30/2009
  • Est. Priority Date: 09/05/2003
  • Status: Active Grant
First Claim
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1. A particle arrangement providing a primary beam path for a primary beam of charged particles to an object, and providing a secondary beam path for charged-particles extending from the object to a detector arrangement, the particle-optical arrangement comprising:

  • at least one charged-particle source for generating at least one beam of charged particles, the primary beam path extending from the at least one charged-particle source to the object;

    a first focusing lens providing a focusing magnetic field;

    an objective lens; and

    a beam splitter, wherein the beam splitter is disposed in the primary beam path between the at least one charged-particle source and the objective lens and in the secondary beam path between the objective lens and the detector arrangement;

    wherein the objective lens provides a focusing magnetic field for the charged-particles of the primary beam and for the charged particles of the secondary beam; and

    wherein the at least one charged-particle source is arranged within the magnetic field provided by the first focusing lens.

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