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Micro-electromechanical system based switching

  • US 7,554,222 B2
  • Filed: 11/01/2007
  • Issued: 06/30/2009
  • Est. Priority Date: 11/01/2007
  • Status: Active Grant
First Claim
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1. A current control device comprising:

  • a first micro electromechanical system (MEMS) switch, said first MEMS switch having a source connection, a drain connection and a gate control electrode;

    a second MEMS switch, said second MEMS switch having a drain connection, a source connection, and a gate control electrode, said second MEMS source connection being coupled to said first MEMS switch source connection, anda circuit electrically connected with said first and second MEMS switch facilitating opening of said first and second MEMS switch.

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