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Sensor with optical pressure transducer and method of manufacturing a sensor component

  • US 7,554,666 B2
  • Filed: 05/22/2007
  • Issued: 06/30/2009
  • Est. Priority Date: 05/25/2006
  • Status: Active Grant
First Claim
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1. A sensor assembly comprising:

  • (a) a housing comprising;

    (i) a flow path,(ii) a first pressure port that communicates with the flow path, and(iii) a second pressure port that communicates with the flow path, wherein the first pressure port is spaced apart from the second pressure port;

    (iv) a channel that runs from the first pressure port to the second pressure port,(b) a flow restriction disposed in the flow path between the first and second pressure ports and that creates a pressure differential therebetween; and

    (c) a pressure transducer comprising a diaphragm disposed in the channel to substantially seal the first pressure port from the second pressure port such that the pressure differential between the first pressure port and the second pressure port causes a deformation of the diaphragm, wherein the pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, and wherein the pressure transducer also comprises an optical interferometer.

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