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MEMS devices with stiction bumps

  • US 7,554,711 B2
  • Filed: 07/24/2006
  • Issued: 06/30/2009
  • Est. Priority Date: 04/08/1998
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical structure (“

  • MEMS”

    ) device comprising an interferometric modulator (“

    IMOD”

    ), wherein said IMOD comprises;

    a substrate;

    a movable membrane comprising a reflective surface, wherein a gap exists between said substrate and said movable membrane; and

    one or more stiction bumps disposed between said substrate and said movable membrane, wherein said one or more stiction bumps are configured to mitigate stiction between said substrate and said movable membrane, wherein said one or more stiction bumps are fabricated on said reflective surface of said movable membrane.

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