MEMS devices with stiction bumps
First Claim
Patent Images
1. A microelectromechanical structure (“
- MEMS”
) device comprising an interferometric modulator (“
IMOD”
), wherein said IMOD comprises;
a substrate;
a movable membrane comprising a reflective surface, wherein a gap exists between said substrate and said movable membrane; and
one or more stiction bumps disposed between said substrate and said movable membrane, wherein said one or more stiction bumps are configured to mitigate stiction between said substrate and said movable membrane, wherein said one or more stiction bumps are fabricated on said reflective surface of said movable membrane.
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Abstract
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.
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Citations
27 Claims
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1. A microelectromechanical structure (“
- MEMS”
) device comprising an interferometric modulator (“
IMOD”
), wherein said IMOD comprises;a substrate; a movable membrane comprising a reflective surface, wherein a gap exists between said substrate and said movable membrane; and one or more stiction bumps disposed between said substrate and said movable membrane, wherein said one or more stiction bumps are configured to mitigate stiction between said substrate and said movable membrane, wherein said one or more stiction bumps are fabricated on said reflective surface of said movable membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- MEMS”
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10. A method of making a microelectromechanical structure (“
- MEMS”
) device comprising an interferometric modulator (“
IMOD”
), comprising;providing a substrate; forming a movable membrane comprising a reflective surface on said substrate, wherein a gap exists between said substrate and said movable membrane; and providing at least one stiction bump configured to mitigate stiction between said substrate and said movable membrane. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
- MEMS”
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20. A microelectromechanical structure (“
- MEMS”
) device comprising an interferometric modulator (“
IMOD”
), the IMOD comprising;a substrate; a movable membrane comprising a reflective surface, wherein a gap exists between said substrate and said movable membrane; and means for reducing stiction between said substrate and said movable membrane, wherein said means for reducing stiction is disposed on said reflective surface of said movable membrane. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27)
- MEMS”
Specification