Integrated optical scanning image acquisition and display
First Claim
1. Apparatus for display of an image, in regard to a limited region of interest, comprising:
- (a) a light source, which emits light;
(b) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to a substrate, the substrate having a proximal end that serves as a support for the fixed end of the cantilever and having a distal end configured to include a channel, the free end of the cantilever extending freely relative to the substrate, enabling a portion of the free end to bend and deflect within the channel in regard to the limited region of interest, the bending of the cantilever scanning light onto an image plane to create an image, wherein the cantilever is configured as one of;
(i) a waveguide that conveys light from the light source within the cantilever, when scanning the light onto the image plane to create the image; and
(ii) a moving carrier for the light source that emits the light, the light source being mounted on the free end of the cantilever and moving when scanning the light emitted by the light source onto the image plane to create the image;
(c) an actuator disposed adjacent to the cantilever and being employed for deflecting the cantilever so as to move the free end to scan in a desired motion;
(d) a photon detector configured to receive light at a location that is proximate to both the free end of the cantilever and the distal end of the support; and
(e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion.
8 Assignments
0 Petitions
Accused Products
Abstract
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro electro-mechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end the cantilever.
-
Citations
54 Claims
-
1. Apparatus for display of an image, in regard to a limited region of interest, comprising:
-
(a) a light source, which emits light; (b) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to a substrate, the substrate having a proximal end that serves as a support for the fixed end of the cantilever and having a distal end configured to include a channel, the free end of the cantilever extending freely relative to the substrate, enabling a portion of the free end to bend and deflect within the channel in regard to the limited region of interest, the bending of the cantilever scanning light onto an image plane to create an image, wherein the cantilever is configured as one of; (i) a waveguide that conveys light from the light source within the cantilever, when scanning the light onto the image plane to create the image; and (ii) a moving carrier for the light source that emits the light, the light source being mounted on the free end of the cantilever and moving when scanning the light emitted by the light source onto the image plane to create the image; (c) an actuator disposed adjacent to the cantilever and being employed for deflecting the cantilever so as to move the free end to scan in a desired motion; (d) a photon detector configured to receive light at a location that is proximate to both the free end of the cantilever and the distal end of the support; and (e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. Apparatus for use either for a far-field image acquisition or for a display of an image, in regard to a limited region of interest comprising a target, wherein the apparatus is configured as a micro-electro-mechanical system (MEMS), the apparatus comprising:
-
(a) a light source, which emits light; (b) a substrate that serves as a support, said substrate having a proximal end and a distal end; (c) a cantilever comprising at least one of a thin film layer and a thick film layer and having a fixed end and a free end, the fixed end remaining fixed proximal to the proximal end of the substrate upon which the cantilever was originally formed and the free end extending freely beyond where the substrate has been removed from supporting the cantilever to define a channel in the substrate, enabling the free end to bend and deflect relative to the channel in the substrate and enabling the free end to bend and deflect relative to the limited region of interest, for scanning with the free end of the cantilever relative to the target; (d) an actuator disposed adjacent to the cantilever, the actuator being employed for bending and deflecting the cantilever so as to move the free end in a desired motion, to scan at least a portion of the limited region of interest; (e) a photon detector configured to receive light at a location that is proximate to both the free end of the cantilever and the distal end of the support; and (f) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
-
-
39. A method for enabling either a far-field image acquisition or a display of an image, in regard to a limited region of interest, using a micro-electro-mechanical system (MEMS), comprising the steps of:
-
(a) providing a cantilever on a substrate, wherein a portion of the substrate underlying the cantilever is removed, thereby forming an elongated groove and supporting the cantilever at a fixed end of the cantilever, the fixed end remaining fixed to the substrate, a free end of the cantilever extending freely beyond where the portion of the substrate was removed from supporting the cantilever, enabling the free end to bend and deflect both within the elongated groove and relative to a target in the limited region of interest, for scanning the target; (b) bending and deflecting the cantilever so as to move the free end in a desired motion to scan the target; (c) receiving light at a location that is proximate to the cantilever and to the support; (d) detecting a position of the free end of the cantilever, producing a signal indicative of the position; and (e) controlling the cantilever to move in the desired motion. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
-
Specification