Process and method for continuous, non lot-based integrated circuit manufacturing

• US 7,555,358 B2
• Filed: 07/25/2002
• Issued: 06/30/2009
• Est. Priority Date: 03/24/1997
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Jones, Mark L., Barnett, Gregory A.
• Primary Examiner(s): Kasenge; Charles R
• Assistant Examiner(s): DeCady; Albert
• Application Number:
  US10/205,918
• Publication Number:
  US 20020183884A1
• Time in Patent Office: 2,532 Days
• Field of Search: 700/115, 700/121, 700/100, 700/116, 700/221, 700/224, 700/227, 209/573, 209/583, 324/165, 324/759, 382/145, 702/117, 702/118, 438/14, 438/16
• US Class Current: 700/121
• CPC Class Codes: G01R 31/31718 Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis mechanical aspects G01R31/2808, G01R31/2851
• CPC Class Codes: G05B 19/128 the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
• CPC Class Codes: G05B 2219/31296 Identification, pallet object data and program code for station
• CPC Class Codes: G05B 2219/45026 Circuit board, pcb
• CPC Class Codes: G06F 11/006 Identification G06F11/2289 takes precedence
• CPC Class Codes: H01L 2223/5444 for electrical read out
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC devices; advancing multiple lots of the IC devices through, for example, a test step in the manufacturing process in a substantially continuous manner; generating data, such as test data, related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device.

Claims

1. A process for tracking at least one integrated circuit device of a plurality of integrated circuit devices in a manufacturing process, the process comprising:

providing each integrated circuit device of the plurality of integrated circuit devices with at least one identification code;

reading the at least one identification code of each integrated circuit device of the plurality of integrated circuit devices;

advancing the plurality of integrated circuit devices through the manufacturing process in a substantially continuous manner;

generating data related to the advancement of each integrated circuit device of the plurality of integrated circuit devices through at least a portion of the manufacturing process;

the data comprising at least one of process variables related to the processing equipment used, the operating personnel present during a manufacturing process, the set-up information for equipment used in the manufacturing process, the time of the manufacturing process, the date of the manufacturing process, performance variables of each integrated circuit device, and any special work request for an integrated circuit device different than that of the manufacturing process; and

associating the data generated for each integrated circuit device of the plurality of integrated circuit devices with the at least one identification code for an associated integrated circuit device of the plurality of integrated circuit devices.

2. The process of claim 1, wherein each integrated circuit device of the plurality of integrated circuit devices is programmed with at least one substantially unique, electrically retrievable identification code, the reading of the at least one identification code of each integrated circuit device of the plurality of integrated circuit devices comprising electrically retrieving the at least one substantially unique, electrically retrievable identification code of each integrated circuit device of the plurality of integrated circuit devices.

3. The process of claim 1, wherein each integrated circuit device of the plurality of integrated circuit devices is programmed with at least one unique fuse identification code, the reading of the at least one identification code of each integrated circuit device of the plurality of integrated circuit devices comprising reading the at least one unique fuse identification code programmed into each integrated circuit device of the plurality of integrated circuit devices.

4. The process of claim 1, wherein advancing the plurality of integrated circuit devices through the manufacturing process includes advancing the plurality of integrated circuit devices through an assembly step.

5. The process of claim 1, wherein advancing the plurality of integrated circuit devices through the manufacturing process includes advancing the plurality of integrated circuit devices through a test procedure.

6. The process of claim 1, wherein reading the at least one identification code of each integrated circuit device of the plurality of integrated circuit devices occurs before advancing the plurality of integrated circuit devices through the manufacturing process.

7. The process of claim 1, wherein advancing the plurality of integrated circuit devices through the manufacturing process includes serially advancing each integrated circuit device of the plurality of integrated circuit devices through multiple machines associated with the manufacturing process.

8. The process of claim 1, wherein advancing the plurality of integrated circuit devices through the manufacturing process includes advancing the plurality of integrated circuit devices through parallel machines associated with the manufacturing process.

9. The process of claim 1, wherein generating data related to the advancement of each integrated circuit device of the plurality of integrated circuit devices through the at least a portion of the manufacturing process comprises generating data selected from a group consisting of processing equipment data, processing personnel data, processing set-up data, time and date data, yield data, and test data.

10. The process of claim 1, further comprising storing the at least one identification code of each integrated circuit device of the plurality of integrated circuit devices, the associating of the data generated for each integrated circuit device of the plurality of integrated circuit devices with the at least one identification code of its associated integrated circuit device comprising storing the data generated for each integrated circuit device of the plurality of integrated circuit devices in association with the stored at least one identification code of its associated integrated circuit device.

11. The process of claim 1, wherein each integrated circuit device of the plurality of integrated circuit devices has an associated lot identification code and the associating data generated for each integrated circuit device of the plurality of integrated circuit devices with the at least one identification code of its associated integrated circuit device comprising storing the data generated for each integrated circuit device of the plurality of integrated circuit devices in association with the lot identification code of its associated integrated circuit device.

12. A manufacturing method for an integrated circuit device for tracking a plurality of integrated circuit devices through a plurality of back-end test steps in a manufacturing process, the method comprising:

programming each integrated circuit device of the plurality of integrated circuit devices with at least one unique fuse identification code; and

for each back-end test step of the plurality of back-end test steps including;

reading the at least one unique fuse identification code of each integrated circuit device of the plurality of integrated circuit devices;

advancing each integrated circuit device of the plurality of integrated circuit devices through the plurality of back-end test steps in the manufacturing process in a substantially continuous manner;

generating data related to the advancement of each integrated circuit device of the plurality of integrated circuit devices through the plurality of back-end test steps, the data further comprising at least one of process variables related to the processing equipment used, the operating personnel present during a manufacturing process, the set-up information for equipment used in the manufacturing process, the time of the manufacturing process, the date of the manufacturing process, performance variables of each integrated circuit device, and any special work request for an integrated circuit device different than that of the manufacturing process; and

associating the data generated for each integrated circuit device of the plurality of integrated circuit devices with the at least one unique fuse identification code its associated integrated circuit device.

13. A manufacturing method for manufacturing a plurality of integrated circuit devices from a semiconductor wafer, the method comprising:

fabricating a plurality of integrated circuit devices on a wafer;

causing each integrated circuit device of the plurality of integrated circuit devices to store at least one substantially unique identification code;

separating each integrated circuit device of the plurality of integrated circuit devices from the wafer to form one integrated circuit device of the plurality of integrated circuit devices;

reading the at least one unique identification code from each integrated circuit device of the plurality of integrated circuit devices;

testing each integrated circuit device of the plurality of integrated circuit devices; and

while manufacturing the plurality of integrated circuit devices, the manufacturing process including;

advancing the plurality of integrated circuit devices through at least one manufacturing process in a substantially continuous manner;

generating data related to the advancement of each integrated circuit device of the plurality of integrated circuit devices through the at least one manufacturing process;

the data comprising at least one of process variables related to the processing equipment used, the operating personnel present during a manufacturing process, the set-up information for equipment used in the manufacturing process, the time of the manufacturing process, the date of the manufacturing process, performance variables of each integrated circuit device, and any special work request for an integrated circuit device different than that of the manufacturing process; and

associating the data generated for each integrated circuit device of the plurality of integrated circuit devices with the at least one substantially unique identification code stored in its associated integrated circuit device.

14. The method of claim 13, wherein fabricating a plurality of integrated circuit devices on the wafer comprises fabricating a plurality of integrated circuit devices of different types selected from a group consisting of Dynamic Random Access Memory integrated circuit devices, Static Random Access Memory integrated circuit devices, Synchronous Dynamic Random Access Memory integrated circuit devices, processor integrated circuit devices, Application Specific integrated circuit devices, Read Only Memory integrated circuit devices, and Electrically Erasable Programmable Read Only Memory integrated circuit devices.

15. The method of claim 13, wherein causing each integrated circuit device of the plurality of integrated circuit devices to store at least one substantially unique identification code comprises programming each integrated circuit device of the plurality of integrated circuit devices to permanently store at least one unique fuse identification code.

16. The method of claim 15, wherein programming each integrated circuit device of the plurality of integrated circuit devices to permanently store at least one substantially unique fuse identification code comprises programming at least one fuse of one of a plurality of fuses and a plurality of anti-fuses in each integrated circuit device of the plurality of integrated circuit devices to permanently store at least one unique fuse identification code.

17. The method of claim 13, wherein testing each integrated circuit device of the plurality of integrated circuit devices includes speed grading testing, burn-in testing, and final testing.

18. The method of claim 13, wherein generating data related to the advancement of each integrated circuit device of the plurality of integrated circuit devices through the at least one manufacturing process comprises generating data identifying test processes the plurality of integrated circuit devices has progressed through and pass/fail results for those test processes, the method further comprising affirming that the plurality of integrated circuit devices has progressed through and passed the identified test processes before advancing the plurality of integrated circuit devices through at least one test process subsequent to the at least one manufacturing process the plurality of integrated circuit devices progress through in a substantially continuous manner.

19. The method of claim 13, further comprising holding some of the plurality of integrated circuit devices in accordance with the at least one substantially unique identification code of an associated integrated circuit device of the plurality of integrated circuit devices.

20. A manufacturing process for an integrated circuit device of a plurality of integrated circuit devices for correlating process-related variables with performance variables related to the performance of each integrated circuit device of the plurality of integrated circuit devices during the manufacturing process, the process comprising:

providing each integrated circuit device of the plurality of integrated circuit devices with at least two unique identification codes;

reading at least one of the at least two unique identification codes from each integrated circuit device of the plurality of integrated circuit devices;

advancing the plurality of integrated circuit devices through at least a portion of the manufacturing process in a substantially continuous manner;

generating data related to at least one process variable associated with the at least a portion of the manufacturing process while the plurality of integrated circuit devices advances through the at least a portion of the manufacturing process, the data comprising at least one of process variables related to the processing equipment used, the operating personnel present during a manufacturing process, the set-up information for equipment used in the manufacturing process, the time of the manufacturing process, the date of the manufacturing process, performance variables of each integrated circuit device, and any special work request for an integrated circuit device different than that of the manufacturing process;

generating data related to performance variables associated with the performance of at least some of the plurality of integrated circuit devices as they advance through the at least a portion of the manufacturing process; and

associating the process variable-related data and the performance variable-related data generated for each integrated circuit device of the plurality of integrated circuit devices with at least one unique identification code of the at least two unique identification codes of an integrated circuit device of the plurality of integrated circuit devices.

21. The process of claim 20, wherein generating data related to performance variables associated with the performance of at least some of the plurality of integrated circuit devices as they advance through the at least a portion of the manufacturing process comprises generating data related to performance variables selected from a group comprising yield and test results.

22. The process of claim 20, wherein providing each integrated circuit device of the plurality of integrated circuit devices with at least two unique identification codes comprises programming each integrated circuit device of the plurality of integrated circuit devices to permanently store at least one unique fuse identification code that specifies at least one of a lot identification code, work week, wafer identification code, die location, and fabrication facility identification code for an integrated circuit device of the plurality of integrated circuit devices.

23. A manufacturing process for manufacturing integrated circuit modules from a plurality of semiconductor wafers, the process comprising:

fabricating a plurality of integrated circuit dice on each wafer of the plurality of semiconductor wafers;

causing each integrated circuit die of the plurality of integrated circuit dice on each wafer of the plurality of semiconductor wafers to store at least one unique identification code;

separating each integrated circuit die of the plurality of integrated circuit dice on each wafer of the plurality of semiconductor wafers from its wafer to form one of a plurality of integrated circuit dice;

assembling a plurality of integrated circuit modules from the plurality of integrated circuit dice;

reading the at least one unique identification code of each integrated circuit die of the plurality of integrated circuit dice in each module of the plurality of integrated circuit modules;

testing each integrated circuit die of the plurality of integrated circuit dice in each module of the plurality of integrated circuit modules;

while manufacturing the plurality of integrated circuit modules;

advancing the plurality of integrated circuit modules through at least a portion of the manufacturing process in a substantially continuous manner;

generating data related to the advancement of the plurality of integrated circuit modules through the at least a portion of the manufacturing process, the data comprising at least one of process variables related to the processing equipment used, the operating personnel present during a manufacturing process, the set-up information for equipment used in the manufacturing process, the time of the manufacturing process, the date of the manufacturing process, performance variables of each integrated circuit device, and any special work request for an integrated circuit device different than that of the manufacturing process; and

associating the data generated for each module of the plurality of integrated circuit modules with the at least one unique identification code of an associated plurality of integrated circuit dice.