Capacitive sensor and a method for manufacturing the capacitive sensor
First Claim
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1. A capacitive sensor comprising:
- a movable electrode; and
a stationary electrode; and
a stationary surface of the capacitive sensor,wherein the shape of the stationary electrode is stepped,wherein the stationary electrode is manufactured onto the stationary surface of the capacitive sensor using thin-film technology,wherein the shape of the stationary surface of the capacitive sensor is essentially planar, andwherein the capacitive sensor is configured to measure capacitance.
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Abstract
The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.
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Citations
47 Claims
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1. A capacitive sensor comprising:
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a movable electrode; and a stationary electrode; and a stationary surface of the capacitive sensor, wherein the shape of the stationary electrode is stepped, wherein the stationary electrode is manufactured onto the stationary surface of the capacitive sensor using thin-film technology, wherein the shape of the stationary surface of the capacitive sensor is essentially planar, and wherein the capacitive sensor is configured to measure capacitance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method for manufacturing a stationary electrode of a capacitive sensor, the method comprising:
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metallizing a metal layer onto a stationary surface of the capacitive sensor; patterning the metal layer by removing the metal layer elsewhere than in the area of the desired pattern; and repeating the metallizing and the patterning at least once such that a stepped electrode structure is obtained, wherein the stationary electrode of the capacitive sensor is manufactured onto the stationary surface of the capacitive sensor in a stepped fashion using thin-film technology, wherein the stationary surface of the capacitive sensor is essentially planar, and wherein the capacitive sensor is configured to measure capacitance. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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Specification