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Capacitive sensor and a method for manufacturing the capacitive sensor

  • US 7,555,950 B2
  • Filed: 09/23/2005
  • Issued: 07/07/2009
  • Est. Priority Date: 09/23/2004
  • Status: Active Grant
First Claim
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1. A capacitive sensor comprising:

  • a movable electrode; and

    a stationary electrode; and

    a stationary surface of the capacitive sensor,wherein the shape of the stationary electrode is stepped,wherein the stationary electrode is manufactured onto the stationary surface of the capacitive sensor using thin-film technology,wherein the shape of the stationary surface of the capacitive sensor is essentially planar, andwherein the capacitive sensor is configured to measure capacitance.

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