Micro-electromechanical integrated circuit device with laminated actuators
First Claim
1. A micro-electromechanical integrated circuit device that comprisesa substrate;
- drive circuitry positioned on the substrate; and
a plurality of elongate actuators, each actuator comprisinga fixed end portion fast with the substrate;
a free end portion that is spaced from the substrate; and
a heating circuit that is connected to the drive circuitry to heat the actuator,at least a portion of the actuator being of a material having a coefficient of thermal expansion which is such that the material is capable of thermal expansion to do work, the heating circuit being positioned to generate differential thermal expansion and contraction when heated and subsequently cooled to cause reciprocal displacement of the free end portion of the actuator, whereineach actuator is a laminated structure having a first metal layer and a dielectric layer, the first metal layer being interposed between the dielectric layer and the substrate and defining the heating circuit.
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Accused Products
Abstract
A micro-electromechanical integrated circuit includes a substrate. Drive circuitry is positioned on the substrate. The device includes a plurality of elongate actuators. Each actuator includes a fixed end portion fast with the substrate. A free end portion is spaced from the substrate. A heating circuit is connected to the drive circuitry to heat the actuator. At least a portion of the actuator is of a material having a coefficient of thermal expansion which is such that the material is capable of thermal expansion to do work. The heating circuit is positioned to generate differential thermal expansion and contraction when heated and subsequently cooled to cause reciprocal displacement of the free end portion of the actuator. Each actuator is a laminated structure having a first metal layer and a dielectric layer. The first metal layer is interposed between the dielectric layer and the substrate and defines the heating circuit.
71 Citations
7 Claims
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1. A micro-electromechanical integrated circuit device that comprises
a substrate; -
drive circuitry positioned on the substrate; and a plurality of elongate actuators, each actuator comprising a fixed end portion fast with the substrate; a free end portion that is spaced from the substrate; and a heating circuit that is connected to the drive circuitry to heat the actuator, at least a portion of the actuator being of a material having a coefficient of thermal expansion which is such that the material is capable of thermal expansion to do work, the heating circuit being positioned to generate differential thermal expansion and contraction when heated and subsequently cooled to cause reciprocal displacement of the free end portion of the actuator, wherein each actuator is a laminated structure having a first metal layer and a dielectric layer, the first metal layer being interposed between the dielectric layer and the substrate and defining the heating circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification