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Ion sources, systems and methods

  • US 7,557,359 B2
  • Filed: 11/15/2006
  • Issued: 07/07/2009
  • Est. Priority Date: 10/16/2003
  • Status: Active Grant
First Claim
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1. A system, comprising:

  • a gas field ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of 10 nm or less at a surface of a sample.

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