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Ion sources, systems and methods

  • US 7,557,361 B2
  • Filed: 11/15/2006
  • Issued: 07/07/2009
  • Est. Priority Date: 10/16/2003
  • Status: Active Grant
First Claim
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1. A system, comprising:

  • a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause scattered ions to leave the sample;

    at least one detector configured so that, during use, the at least one detector can detect at least some of the scattered ions; and

    an electronic processor electrically connected to the at least one detector so that, during use, the electronic processor can process information based on the detected scattered ions to determine information about the sample.

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