Method of expanding tester drive and measurement capability

• US 7,557,592 B2
• Filed: 06/06/2006
• Issued: 07/07/2009
• Est. Priority Date: 06/06/2006
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Miller, Charles A.
• Primary Examiner(s): Nguyen; Ha Tran T
• Assistant Examiner(s): Chan; Emily Y
• Application Number:
  US11/422,573
• Publication Number:
  US 20070296422A1
• Time in Patent Office: 1,127 Days
• Field of Search: 324754-765
• US Class Current: 324/756.03
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

A probe card assembly can comprise an interface, which can be configured to receive from a tester test signals for testing an electronic device. The probe card assembly can further comprise probes for contacting the electronic device and electronic driver circuits for driving the test signals to ones of the probes.

Claims

1. A probe card assembly comprising:

an interface configured to receive from a tester test signals for testing an electronic device;

probes for contacting a plurality of electronic devices;

transmission lines having a characteristic impedance and being electrically connected to the probes; and

electronic driver circuits connected to the interface and each configured to drive one of the test signals through a plurality of the probes via the transmission lines, wherein the one test signal can be provided to more than one of the electronic devices, and wherein an output impedance of each of the driver circuits is less than the characteristic impedance of the transmission lines.

2. The probe card assembly of claim 1 further comprising a plurality of interconnected substrates, wherein the driver circuits are disposed on at least one of the substrates.

3. The probe card assembly of claim 1, wherein the driver circuits are located within about twelve inches of the probes through which the driver circuits drive the test signals.

4. The probe card assembly of claim 1, wherein a wavelength corresponding to a maximum operating frequency of the driver circuits is at least about ten times the distance between the driver circuits and the probes.

5. The probe card assembly of claim 1, wherein:

the probes are attached to a probe substrate,

the driver circuits are disposed on a wiring board, and

the wiring board is connected to the probe substrate.

6. The probe card assembly of claim 1, wherein at least one of the driver circuits drives one test signal received from the tester to a plurality of probes.

7. The probe card assembly of claim 6, wherein the at least one driver circuit drives the one test signal to at least four probes.

8. The probe card assembly of claim 6, wherein the at least one driver circuit drives the one test signal to at least thirty probes.

9. The probe card assembly of claim 6 further comprising a plurality of resistors disposed between the at least one driver circuit and the plurality of probes, wherein the resistors electrically isolate one of the plurality of probes from the others of the plurality of probes.

10. The probe card assembly of claim 9, wherein the output impedance of the at least one driver circuit approximately equals a total effective resistance of the plurality of resistors.

11. The probe card assembly of claim 9, wherein the plurality of resistors are disposed on a probe substrate to which the probes are attached.

12. The probe card assembly of claim 1, wherein the output impedance of at least one of the driver circuits is less than thirty ohms.

13. The probe card assembly of claim 1, wherein the output impedance of at least one of the driver circuits is less than twenty ohms.

14. The probe card assembly of claim 1, wherein the electronic device comprises a plurality of semiconductor dies composing an unsingulated semiconductor wafer.

15. The probe card assembly of claim 1, wherein the output impedance of at least one of the driver circuits is less than ten ohms.

16. The probe card assembly of claim 1, wherein the output impedance of at least one of the driver circuits is less than five ohms.

17. The probe card assembly of claim 1, wherein the output impedance of at least one of the driver circuits is less than one ohm.

18. The probe card assembly of claim 1, wherein a wavelength corresponding to a maximum operating frequency of the driver circuits is at least about five times the distance between the driver circuits and the probes.