Cantilever microprobes for contacting electronic components and methods for making such probes
First Claim
1. A probe device for contacting an electronic component, comprising:
- at least one elongated base element for mounting to a surface of a substrate;
at least one post element having a proximal end attached to the elongated base element and having a distal end, wherein the post element only partially covers the elongated base element;
a composite beam element, comprising at least three vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and
a contact element attached to the bridge element or to one of the beams of the composite beam element,wherein a portion of the elongated base element that is uncovered by the at least one post element extends at least partially under the composite beam element.
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Accused Products
Abstract
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.
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Citations
11 Claims
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1. A probe device for contacting an electronic component, comprising:
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at least one elongated base element for mounting to a surface of a substrate; at least one post element having a proximal end attached to the elongated base element and having a distal end, wherein the post element only partially covers the elongated base element; a composite beam element, comprising at least three vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and a contact element attached to the bridge element or to one of the beams of the composite beam element, wherein a portion of the elongated base element that is uncovered by the at least one post element extends at least partially under the composite beam element. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A probe device for contacting an electronic component, comprising:
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a base element for mounting to a surface of a substrate; at least one post element having a proximal end attached to the base element and having a distal end; a composite beam element, comprising at least two vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and a contact element attached to the bridge element or to one of the beams of the composite beam element; and an intermediate bridging element that connects at least two of the beams to one another at a position along each beam that is intermediate to the proximal end and the distal end of each beam. - View Dependent Claims (8, 9, 10, 11)
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Specification