Semiconductor light emitting element and fabrication method thereof
First Claim
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1. A semiconductor light emitting element, comprising:
- a first semiconductor layer of first conductivity type;
an active layer formed on said first semiconductor layer;
a semiconductor layer of second conductivity type having a one surface which is formed on said active layer and whose one surface comprises an optical window from which a light is extracted, and having a plurality of recesses formed to define a plurality of bosses;
a dielectric film formed of a dielectric material having light transmissivity in said recesses to fill up said recesses and to allow the light to be extracted therefrom; and
a conductor film formed on said recesses and bosses and having light transmissivity and formed on said one surface of said semiconductor layer andan electrode formed on a region of said conductor film opposing to said optical window,wherein said dielectric film formed in said recesses does not have low-resistive contact with said conductor film, and said conductor film and said semiconductor layer of second conductivity type are electrically connected via said bosses to each other.
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Abstract
In a semiconductor light emitting element, multiple bosses having a cylindrical shape and dispersed like islands, and recesses are formed on the upper surface of a window layer. A contact electrode is formed on the upper surface of the bosses. A transparent dielectric film is formed in the recesses. A transparent conductor film is formed on the transparent dielectric film and the contact electrode.
22 Citations
9 Claims
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1. A semiconductor light emitting element, comprising:
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a first semiconductor layer of first conductivity type; an active layer formed on said first semiconductor layer; a semiconductor layer of second conductivity type having a one surface which is formed on said active layer and whose one surface comprises an optical window from which a light is extracted, and having a plurality of recesses formed to define a plurality of bosses; a dielectric film formed of a dielectric material having light transmissivity in said recesses to fill up said recesses and to allow the light to be extracted therefrom; and a conductor film formed on said recesses and bosses and having light transmissivity and formed on said one surface of said semiconductor layer and an electrode formed on a region of said conductor film opposing to said optical window, wherein said dielectric film formed in said recesses does not have low-resistive contact with said conductor film, and said conductor film and said semiconductor layer of second conductivity type are electrically connected via said bosses to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification