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Film bulk acoustic resonator (FBAR) devices with temperature compensation

  • US 7,561,009 B2
  • Filed: 11/30/2005
  • Issued: 07/14/2009
  • Est. Priority Date: 11/30/2005
  • Status: Active Grant
First Claim
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1. A temperature-compensated film bulk acoustic resonator (FBAR) device, comprising:

  • an FBAR stack, comprising;

    an FBAR characterized by a resonant frequency having a temperature coefficient, the FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, the piezoelectric element having a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part, and a temperature-compensating layer between the electrodes comprising doped silicon dioxide.

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