Method and apparatus for reducing back-glass deflection in an interferometric modulator display device

• US 7,561,334 B2
• Filed: 12/20/2005
• Issued: 07/14/2009
• Est. Priority Date: 12/20/2005
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Luo, Qi
• Primary Examiner(s): Lester; Evelyn A.
• Application Number:
  US11/313,436
• Publication Number:
  US 20070139655A1
• Time in Patent Office: 1,302 Days
• Field of Search: 359/577, 359/578, 359/223, 359/224, 359237-320, 345/55, 345 84-111, 348744-774
• US Class Current: 359/577
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: B81C 2203/0163 Reinforcing a cap, e.g. with ribs
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that includes a including a substrate, an optical stack formed on the substrate, a moveable reflective layer formed over the optical stack, and a backplate attached to the substrate. The moveable reflective layer includes one or more first posts extending therefrom, in which one or more of the first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected.

Claims

1. An interferometric modulator display comprising:

a substrate;

an array of interferometric modulators on the substrate, the interferometric modulators comprising;

an optical stack; and

a moveable reflective layer formed over the optical stack,

wherein the array comprises one or more first posts extending therefrom; and

a backplate attached to the substrate, the backplate comprising a recessed backplate including a non-recessed island formed therein, wherein the one or more first posts are operable to protect the moveable reflective layer by contacting the non-recessed island if the recessed backplate is deflected.

2. The interferometric modulator display of claim 1, wherein the non-recessed island is formed substantially in the center of the recessed backplate.

3. The interferometric modulator display of claim 1, further comprising one or more second non-recessed islands formed within the backplate, wherein the one or more first posts are further operable to protect the moveable reflective layer by contacting the one or more second non-recessed islands if the recessed backplate is deflected.

4. The interferometric modulator display of claim 1, wherein a top surface of the non-recessed island is substantially planar to an edge of the backplate that attaches to the substrate.

5. The interferometric modulator display of claim 1, further comprising desiccant dispensed on the backplate wound the non-recessed island, the desiccant to absorb moisture within the interferometric modulator display.

6. The interferometric modulator display of claim 1, wherein the one or more first posts have a circular cross-section.

7. The interferometric modulator display of claim 1, wherein the one or more first posts have a non-circular cross-section.

8. The interferometric modulator display of claim 1, further comprising:

a processor that is in electrical communication with the interferometric modulator display, the processor being configured to process image data; and

a memory device in electrical communication with the processor.

9. The interferometric modulator display of claim 8, further comprising:

a first controller configured to send at least one signal to the interferometric modulator display; and

a second controller configured to send at least a portion of the image data to the first controller.

10. The interferometric modulator display of claim 8, further comprising an image source module configured to send the image data to the processor.

11. The interferometric modulator display of claim 10, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

12. The interferometric modulator display of claim 8, further comprising an input device configured to receive input data and to communicate the input data to the processor.

13. The interferometric modulator display of claim 1, wherein the substrate comprises glass.

14. The interferometric modulator display of claim 1, wherein the optical stack is partially transmissive.

15. The interferometric modulator display of claim 1, wherein the optical stack and the moveable reflective layer collectively form an interferometric cavity.

16. The interferometric modulator display of claim 1, wherein the moveable reflective layer comprises a mirror.

17. The interferometric modulator display of claim 1, wherein the backplate is substantially rigid.

18. An interferometric modulator display comprising:

a substrate means;

an array of means for interferometrically modulating light, the modulating means comprising;

an optical stack means; and

a moveable reflective layer means formed over the optical stack means,

wherein the array comprises one or more first post means extending therefrom; and

a recessed backplate means attached to the substrate means, the recessed backplate means including a non-recessed island means formed therein,

wherein the one or more first post means are operable to protect the moveable reflective layer means by contacting the non-recessed island means if the recessed backplate means is deflected.

19. The interferometric modulator display of claim 18, wherein the non-recessed island means is formed substantially in the center of the recessed backplate means.

20. The interferometric modulator display of claim 18, further comprising one or more second non-recessed island means formed within the backplate means, wherein the one or more first post means are further operable to protect the moveable reflective layer means by contacting the one or more second non-recessed island means if the recessed backplate means is deflected.

21. The interferometric modulator display of claim 18, wherein:

the optical stack means is patterned into parallel strips that form rows of the interferometric modulator display; and

wherein the one or more first post means extend from the optical stack means between the rows of the interferometric modulator display.

22. The interferometric modulator display of claim 21, the moveable reflective layer means comprising columns that are orthogonal to the parallel strips of the optical stack means, and wherein the one or more first post means extend from the moveable reflective layer means between the columns.

23. The interferometric modulator display of claim 18, wherein the substrate comprises glass.

24. The interferometric modulator display of claim 18, wherein the optical stack is partially transmissive.

25. The interferometric modulator display of claim 18, wherein the optical stack and the moveable reflective layer collectively form an interferometric cavity.

26. The interferometric modulator display of claim 18, wherein the moveable reflective layer comprises a mirror.

27. The interferometric modulator display of claim 18, wherein the backplate is substantially rigid.