Impact-resistant acceleration sensor
First Claim
1. An acceleration sensor comprising:
- an acceleration sensor element havinga weight located in a center of the acceleration sensor element,a support frame surrounding the weight and being at a predetermined distance from the weight,a plurality of elastic arms bridging an upper portion of the weight and an upper portion of the support frame and hanging the weight, andstrain gauges formed on the elastic arms;
a first regulation plate mounted on the acceleration sensor element with a first predetermined gap with a top surface of the weight; and
a protection case with an inner bottom plate fixed to a bottom surface of the support frame of the acceleration sensor element, wherein said inner bottom plate has a gap between a weight bottom surface and a part of the inner bottom plate of the protection case facing the weight bottom surface;
wherein an impact buffer material is fixed to at least one of the weight bottom surface and the part of the inner bottom plate of the protection case facing the weight bottom surface, and the other of the weight bottom surface and the part of the inner bottom plate of the protection case facing the weight bottom surface forms a second predetermined gap with the impact buffer material.
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Accused Products
Abstract
An acceleration sensor, which has realized such a high impact-resistance that a weight bottom surface of an acceleration sensor element does not directly collide with an inner bottom plate of a protection case made of ceramic, glass or silicon to avoid edges and corners of the weight bottom surface of the acceleration sensor element chipping, even when an excessive acceleration or impact is applied to the acceleration sensor. The acceleration sensor comprises the acceleration sensor element having in a center a weight that works as a pendulum when acceleration is applied, and the protection case housing the acceleration sensor element. The inner bottom plate of the protection case works as a regulation plate to prevent the weight from excessively swing downwards. An impact buffer material of a metal layer or a resin layer is provided on the weight bottom surface or the inner bottom plate of the protection case.
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Citations
11 Claims
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1. An acceleration sensor comprising:
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an acceleration sensor element having a weight located in a center of the acceleration sensor element, a support frame surrounding the weight and being at a predetermined distance from the weight, a plurality of elastic arms bridging an upper portion of the weight and an upper portion of the support frame and hanging the weight, and strain gauges formed on the elastic arms; a first regulation plate mounted on the acceleration sensor element with a first predetermined gap with a top surface of the weight; and a protection case with an inner bottom plate fixed to a bottom surface of the support frame of the acceleration sensor element, wherein said inner bottom plate has a gap between a weight bottom surface and a part of the inner bottom plate of the protection case facing the weight bottom surface; wherein an impact buffer material is fixed to at least one of the weight bottom surface and the part of the inner bottom plate of the protection case facing the weight bottom surface, and the other of the weight bottom surface and the part of the inner bottom plate of the protection case facing the weight bottom surface forms a second predetermined gap with the impact buffer material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification