Methods and arrangement for implementing highly efficient plasma traps
First Claim
1. A plasma system comprising:
- a microwave waveguide assembly;
an upstream plurality of hollow center electrically conductive, disks;
a downstream plurality of hollow center electrically conductive disks; and
a plasma tube assembly intersecting said microwave waveguide assembly, said plasma tube assembly having a plasma-sustaining region defined between said upstream plurality of hollow center electrically conductive disks and said downstream plurality of hollow center electrically conductive disks,wherein a first hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disk and said downstream plurality of hollow center electrically conductive disks includes a first downstream corrugated outer surface and a first upstream corrugated outer surface disposed opposite to said first downstream corrugated outer surface, said first hollow center electrically conductive disk further including a first plurality of corrugated peaks disposed on said first downstream corrugated outer surface, said first hollow center electrically conductive disk further including a second plurality of corrugated peaks disposed on said first upstream corrugated outer surface, anda second hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disk and said downstream plurality of hollow center electrically conductive disks includes a second upstream corrugated outer surface and a second downstream corrugated outer surface disposed opposite to said second upstream outer surface, said second hollow center electrically conductive disk further including a third plurality of corrugated peaks disposed on said second downstream corrugated outer surface, said second hollow center electrically conductive disk further including a fourth plurality of corrugated peaks disposed on said second upstream corrugated outer surface, said second upstream corrugated outer surface facing said first downstream corrugated outer surface.
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Accused Products
Abstract
An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.
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Citations
30 Claims
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1. A plasma system comprising:
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a microwave waveguide assembly; an upstream plurality of hollow center electrically conductive, disks; a downstream plurality of hollow center electrically conductive disks; and a plasma tube assembly intersecting said microwave waveguide assembly, said plasma tube assembly having a plasma-sustaining region defined between said upstream plurality of hollow center electrically conductive disks and said downstream plurality of hollow center electrically conductive disks, wherein a first hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disk and said downstream plurality of hollow center electrically conductive disks includes a first downstream corrugated outer surface and a first upstream corrugated outer surface disposed opposite to said first downstream corrugated outer surface, said first hollow center electrically conductive disk further including a first plurality of corrugated peaks disposed on said first downstream corrugated outer surface, said first hollow center electrically conductive disk further including a second plurality of corrugated peaks disposed on said first upstream corrugated outer surface, and a second hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disk and said downstream plurality of hollow center electrically conductive disks includes a second upstream corrugated outer surface and a second downstream corrugated outer surface disposed opposite to said second upstream outer surface, said second hollow center electrically conductive disk further including a third plurality of corrugated peaks disposed on said second downstream corrugated outer surface, said second hollow center electrically conductive disk further including a fourth plurality of corrugated peaks disposed on said second upstream corrugated outer surface, said second upstream corrugated outer surface facing said first downstream corrugated outer surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A plasma system comprising:
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a microwave waveguide assembly; an upstream hollow center electrically conductive disk set; a downstream hollow center electrically conductive disk set disposed downstream relative to said upstream hollow center electrically conductive disk set; and a plasma tube assembly intersecting said microwave waveguide assembly, said plasma tube assembly having a plasma-sustaining region defined between said upstream hollow center electrically conductive disk set and said downstream hollow center electrically conductive disk set, wherein a first hollow center electrically conductive disk among at least one of said upstream hollow center electrically conductive disk set and said downstream hollow center electrically conductive disk set includes a first set of corrugated peaks disposed on an outer surface of said first hollow center electrically conductive disk, each of said first set of corrugated peaks having a rectangular cross section, and a second hollow center electrically conductive disk among at least one of said upstream hollow center electrically conductive disk set and said downstream hollow center electrically conductive disk set includes a second set of corrugated peaks disposed on an outer surface of said second hollow center electrically conductive disk, a cross section of each of said second set of corrugated peaks is rectangular, said second set of corrugated peaks being aligned with said first set of corrugated peaks, said outer surface of said first hollow center electrically conductive disk facing said outer surface of said second hollow center electrically conductive disk. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A plasma system comprising:
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a microwave waveguide assembly; an upstream plurality of hollow center electrically conductive disks; a downstream plurality of hollow center electrically conductive disks; and a plasma tube assembly intersecting said microwave waveguide assembly, said plasma tube assembly having a plasma-sustaining region defined between said upstream plurality of hollow center electrically conductive disks and said downstream plurality of hollow center electrically conductive disks, wherein a first hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disks and said downstream plurality of hollow center electrically conductive disks includes a lust plurality of corrugated peaks disposed on an outer surface of said first hollow center electrically conductive disk, and a second hollow center electrically conductive disk among at least one of said upstream plurality of hollow center electrically conductive disks and downstream plurality of hollow center electrically conductive disks includes a second plurality of corrugated peaks disposed on an outer surface of said second hollow center electrically conductive disk, said second plurality of corrugated peaks being offset relative to said first plurality of corrugated peaks, said outer surface of said first hollow center electrically conductive disk facing said outer surface of said second hollow center electrical conductive disk. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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Specification