Terahertz sensing apparatus using a transmission line

• US 7,564,034 B2
• Filed: 07/27/2005
• Issued: 07/21/2009
• Est. Priority Date: 07/30/2004
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ouchi, Toshihiko
• Primary Examiner(s): Porta; David P
• Assistant Examiner(s): Eley; Jessica L
• Application Number:
  US10/566,238
• Publication Number:
  US 20060197021A1
• Time in Patent Office: 1,455 Days
• Field of Search: 250/343, 250/340
• US Class Current: 250/340
• CPC Class Codes: G01N 21/3581 using far infrared light; using Terahertz radiation

Abstract

A sensing apparatus is provided which comprises a chip (20) in which a transmission line (2) for propagating an electromagnetic wave is formed on a substrate (1), an electromagnetic wave generator (7) for generating an electromagnetic wave (10), a coupling means (9), and a detector (5) for detecting a propagation state of an electromagnetic wave at an arbitrary location on the transmission line, of the electromagnetic wave propagating through the transmission line (2). An interaction between an object (4) disposed in the vicinity of the transmission line (2) and the electromagnetic wave is detected by the detector (5) to sense a spatial interaction state of the object (4) with the electromagnetic wave.

Claims

1. A sensing apparatus comprising:

a transmission line for propagating an electromagnetic wave therethrough; and

a detection unit for detecting a propagation state of the electromagnetic wave at an arbitrary location on the transmission line,

wherein an interaction between an object disposed in the vicinity of the transmission line and the electromagnetic wave is detected, and

wherein the transmission line has a resonance structure for confining the propagating electromagnetic wave, and the resonance structure comprises a distributed reflective region having a periodic structure.

2. The sensing apparatus according to claim 1, further comprising an electromagnetic wave generating unit.

3. The sensing apparatus according to claim 2, wherein the transmission line and the electromagnetic wave generating unit are disposed on a same substrate.

4. The sensing apparatus according to claim 2, wherein the electromagnetic wave generating unit is of a current-injection type.

5. The sensing apparatus according to claim 1, wherein the detection unit comprises a thin-line-shaped probe.

6. The sensing apparatus according to claim 1, wherein the detection unit comprises a probe with a tip of a diameter which is not more than 1/10 of a wavelength of a propagating electromagnetic wave.

7. The sensing apparatus according to claim 1, wherein the detection unit detects the propagation state on the transmission line at a plurality of locations.

8. The sensing apparatus according to claim 7, wherein the detection unit detects the propagation state of the electromagnetic wave at the plurality of locations by changing a relative positional relationship between the detection unit and the transmission line by scanning.

9. The sensing apparatus according to claim 7, wherein the detection unit that detects the propagation state of the electromagnetic wave at the plurality of locations comprises an electrooptic crystal.

10. A sensing apparatus according to claim 1, wherein the electromagnetic wave has a frequency within the range of 30 GHz to 30 THz.

11. A sensing apparatus comprising:

a transmission line for propagating an electromagnetic wave therethrough;

a detection unit for detecting a propagation state of the electromagnetic wave through the transmission line; and

a flow path disposed in the vicinity of the transmission line, for allowing an object to move therein,

wherein an interaction between the object and the electromagnetic wave is detected, and

wherein the transmission line has a resonance structure for confining a propagating electromagnetic wave, and the resonance structure comprises a reflective region having a periodic structure.

12. The sensing apparatus according to claim 11, wherein the detection unit is provided at a plurality of locations.

13. The sensing apparatus according to claim 11, wherein the electromagnetic wave has a frequency within the range of 30 GHz to 30 THz.