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Micro-electro-mechanical transducer having embedded springs

  • US 7,564,172 B1
  • Filed: 08/03/2006
  • Issued: 07/21/2009
  • Est. Priority Date: 08/03/2005
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical transducer comprising:

  • a base having a lower portion and an upper portion;

    a top plate disposed above the upper portion of the base forming a gap therebetween;

    a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and the top plate; and

    a first transducing member on the top plate and a second transducing member included in the base or carried by the base.

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