Photonic MEMS and structures

• US 7,564,612 B2
• Filed: 08/19/2005
• Issued: 07/21/2009
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence
• Primary Examiner(s): Lester; Evelyn A.
• Application Number:
  US11/208,420
• Publication Number:
  US 20060067651A1
• Time in Patent Office: 1,432 Days
• Field of Search: 359/223, 359/224, 359290-295, 359/298, 359/315
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Claims

1. An optical device, comprising;

a non-transparent reflective surface formed on a substrate; and

a movable optical layer which is at least partially reflective to incident light and at least partially transmissive to incident light, the movable optical layer spaced from the non-transparent reflective surface, wherein the movable optical layer is movable between a first position with a first distance between the movable optical layer and the non-transparent reflective surface and a second position with a second distance between the movable optical layer and the non-transparent reflective surface, wherein the movable optical layer interferometrically modulates light in at least the first and second positions,

wherein the device further comprises a passivation layer over the substrate.

2. The device of claim 1, wherein the substrate comprises a metal.

3. The device of claim 2, wherein the substrate comprises steel.

4. The device of claim 2, wherein the substrate comprises aluminum.

5. The device of claim 2, wherein the substrate comprises a metal foil.

6. The device of claim 1, wherein the substrate comprises a plastic material.

7. The device of claim 1, wherein the substrate is flexible.

8. The device of claim 1, wherein the substrate comprises a ceramic material.

9. The device of claim 1, wherein the substrate comprises silicon.

10. The device of claim 9, wherein the substrate comprises circuitry, the substrate sufficiently non-transparent to shield the circuitry from light.

11. The device of claim 10, wherein the circuitry comprises control circuitry for the device.

12. The device of claim 1, further comprising an illumination source, the substrate sufficiently reflective to reduce loss of light from the illumination source through the substrate.

13. The device of claim 1, wherein the substrate comprises a printed circuit board.

14. The device of claim 1, wherein the substrate comprises a conductive layer.

15. The device of claim 14, wherein the movable optical layer moves between the first position and the second position in response to voltages applied to the conductive layer.

16. The device of claim 1, wherein the substrate has a thickness between about 0.1 millimeter and about 1.0 millimeter.

17. The device of claim 1, wherein the substrate comprises a metal and the passivation layer provides electrical isolation to the substrate.

18. The device of claim 1, further comprising a conductive layer over the passivation layer, and a dielectric layer over the conductive layer, at least one of the substrate, the passivation layer, the conductive layer and the dielectric layer is non- transparent.

19. An optical device, comprising:

a non-transparent reflective surface formed on a substrate; and

a movable optical layer which is at least partially reflective to incident light and at least partially transmissive to incident light, the movable optical layer spaced from the non-transparent reflective surface, wherein the movable optical layer is movable between a first position with a first distance between the movable optical layer and the non-transparent reflective surface and a second position with a second distance between the movable optical layer and the non-transparent reflective surface, wherein movement of the movable optical layer between the first and second positions interferometrically modulates the reflectivity of the device,

wherein the substrate comprises a conductive layer, and

wherein the device further comprises conductive traces electrically coupled to the conductive layer, wherein the substrate matches an optical appearance of the conductive traces.

20. An optical device, comprising:

a non-transparent reflective surface formed on a substrate; and

a movable optical layer which is at least partially reflective to incident light and at least partially transmissive to incident light, the movable optical layer spaced from the non-transparent reflective surface, wherein the movable optical layer is movable between a first position with a first distance between the movable optical layer and the non-transparent reflective surface and a second position with a second distance between the movable optical layer and the non-transparent reflective surface, wherein movement of the movable optical layer between the first and second positions interferometrically modulates the reflectivity of the device, wherein the device has a dark state having a color, and the substrate matches the color.

21. An optical device, comprising:

a non-transparent reflective surface formed on a substrate;

a movable optical layer which is at least partially reflective to incident light and at least partially transmissive to incident light, the movable optical layer spaced from the non-transparent reflective surface, wherein the movable optical layer is movable between a first position with a first distance between the movable optical layer and the non-transparent reflective surface and a second position with a second distance between the movable optical layer and the non-transparent reflective surface, wherein movement of the movable optical layer between the first and second positions interferometrically modulates the reflectivity of the device;

a display comprising said non-transparent reflective surface and said movable optical layer;

a processor that is in electrical communication with the display, the processor being configured to process image data; and

a memory device in electrical communication with the processor.

22. The device of claim 21, further comprising:

a first controller configured to send at least one signal to the display; and

a second controller configured to send at least a portion of the image data to the first controller.

23. The device of claim 21, further comprising an image source module configured to send the image data to the processor.

24. The device of claim 23, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

25. The device of claim 21, further comprising an input device configured to receive input data and to communicate the input data to the processor.