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Method of manufacturing a write pole

  • US 7,565,732 B2
  • Filed: 08/31/2004
  • Issued: 07/28/2009
  • Est. Priority Date: 08/31/2004
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a magnetic write head comprising:

  • depositing a layer of magnetic material on a flux guide layer;

    depositing a first hard mask layer on said layer of magnetic material;

    depositing a second hard mask layer on said first hard mask layer;

    depositing a third hard mask layer on said second hard mask layer;

    depositing a photo-resist layer upon said third hard mask layer;

    patterning said photo-resist layer to define a write pole;

    reactive ion etching said third hard mask layer exposed by said pattern photo-resist layer wherein a third hard mask defining said write pole is formed;

    reactive ion etching said second hard mask layer and said first hard mask layer exposed by said patterned third hard mask wherein a first hard mask and second hard mask defining said write pole is formed;

    ion milling said layer of magnetic material exposed by said second hard mask and said first hard mask wherein a beveled write pole is formed;

    forming a conformal spacer upon a portion of a flare length proximate a tip of said beveled write pole; and

    forming a shield layer upon said conformal spacer adjacent said flare length proximate said tip of said beveled write pole.

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