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Plasma processing apparatus

  • US 7,565,879 B2
  • Filed: 09/30/2004
  • Issued: 07/28/2009
  • Est. Priority Date: 03/16/1995
  • Status: Expired due to Fees
First Claim
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1. A plasma processing apparatus for processing a specimen comprising:

  • a process chamber capable of having an inside pressure thereof reduced, the process chamber including an outer cylinder having a metallic surface and having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder so as to delimit a gap between the outer cylinder and the inner cylinder, the inner cylinder being made of non-magnetic material and being detachably connected to the outer cylinder so as to be detachable from the outer cylinder;

    a process gas supply unit for supplying gas to the process chamber;

    a plasma generating unit for generating a plasma inside of the inner cylinder of the process chamber;

    a heat transfer gas supply system for supplying heat transfer gas into the gap;

    a pressure controller for controlling pressure in the gap so as to control a temperature difference between the outer cylinder and the inner cylinder;

    a specimen table disposed inside of the inner cylinder for holding a specimen;

    a vacuum pumping unit for evacuating the process chamber;

    a temperature monitoring unit for monitoring a temperature of the inner cylinder; and

    a temperature controller configured to control a temperature of the outer cylinder using a heater mounted on the outer cylinder, the temperature controller enabling comparison of a predetermined inner cylinder temperature which is given in advance in response to a processing condition of the specimens with the monitored temperature of the inner cylinder and for controlling the temperature of the outer cylinder in response to a result of the comparison so as to control the inner cylinder temperature to the predetermined inner cylinder temperature.

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