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Electromechanical devices having overlying support structures

  • US 7,566,940 B2
  • Filed: 07/21/2006
  • Issued: 07/28/2009
  • Est. Priority Date: 07/22/2005
  • Status: Expired due to Fees
First Claim
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1. An electromechanical device, comprising:

  • a substrate;

    an electrode layer located over the substrate;

    a conductive movable layer located over the electrode layer, wherein the movable layer is generally spaced apart from the electrode layer by an air gap, and wherein the movable layer comprises depressions in support regions; and

    rigid support structures formed over the movable layer and at least partially within the depressions in the movable layer, wherein the rigid support structures extend over only a portion of the movable layer.

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