Support device with discrete getter material microelectronic devices
First Claim
Patent Images
1. A system comprising:
- a support device including discrete deposits of contaminant removing material on a base layer of a material selected from the group consisting essentially of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected from among the group of materials consisting essentially of getter materials and drier materials; and
a manufacturing layer covering said contaminant removing material, wherein said manufacturing layer includes a substrate layer which may be used in the manufacture of a microdevice; and
passages formed in said manufacturing layer by removing selected portions of said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities.
1 Assignment
0 Petitions
Accused Products
Abstract
The specification teaches a system for manufacturing microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In an embodiment, a system for manufacturing the devices includes efficiently integrating a getter material in multiple microdevices.
-
Citations
20 Claims
-
1. A system comprising:
-
a support device including discrete deposits of contaminant removing material on a base layer of a material selected from the group consisting essentially of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected from among the group of materials consisting essentially of getter materials and drier materials; and a manufacturing layer covering said contaminant removing material, wherein said manufacturing layer includes a substrate layer which may be used in the manufacture of a microdevice; and passages formed in said manufacturing layer by removing selected portions of said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. An apparatus, comprising:
-
a support device including discrete deposits of contaminant removing material in a base layer of a material selected from the group consisting essentially of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected from among the group of materials consisting essentially of getter materials and drier materials, the contaminant removing material deposited in hollows of the base layer; and a manufacturing layer covering said contaminant removing material, wherein said manufacturing layer includes a substrate layer which may be used in the manufacture of a microdevice; and passages formed in said manufacturing layer by removing selected portions of said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
-
-
20. An apparatus, comprising:
-
a support device including discrete deposits of contaminant removing material in a base layer of a material selected from the group consisting essentially of glasses, ceramics, semiconductors and metals, wherein said contaminant removing material is selected from among the group of materials consisting essentially of getter materials and drier materials, the contaminant removing material deposited in hollows of the base layer; and a manufacturing layer covering said contaminant removing material, wherein said manufacturing layer includes a substrate layer which may be used in the manufacture of a microdevice; passages formed in said manufacturing layer by removing selected portions of said manufacturing layer, such that said contaminant removing material is exposed to atmosphere, wherein said passages create cavities; and a covering layer covering the manufacturing layer, the covering layer separating the atmosphere of the apparatus from an external atmosphere.
-
Specification