Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches

• US 7,567,414 B2
• Filed: 11/02/2005
• Issued: 07/28/2009
• Est. Priority Date: 11/02/2004
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Rueckes, Thomas, Bertin, Claude L., Ward, Jonathan W., Segal, Brent M.
• Primary Examiner(s): Jackson; Stephen W
• Assistant Examiner(s): HOANG, ANN THI
• Application Number:
  US11/264,935
• Publication Number:
  US 20060193093A1
• Time in Patent Office: 1,364 Days
• Field of Search: 361/56
• US Class Current: 361/56
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/165 Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses digital stores using resistance random access memory elements G11C13/0002
• CPC Class Codes: G11C 2213/17 Memory cell being a nanowire transistor
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 2224/16 of an individual bump connector
• CPC Class Codes: H01L 23/60 Protection against electrostatic charges or discharges, e.g. Faraday shields
• CPC Class Codes: H01L 23/62 Protection against overvoltage, e.g. fuses, shunts
• CPC Class Codes: H01L 27/0248 for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
• CPC Class Codes: H01L 27/0251 for MOS devices
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/0102 Calcium [Ca]
• CPC Class Codes: H01L 2924/01025 Manganese [Mn]
• CPC Class Codes: H01L 2924/01046 Palladium [Pd]
• CPC Class Codes: H01L 2924/01066 Dysprosium [Dy]
• CPC Class Codes: H01L 2924/01068 Erbium [Er]
• CPC Class Codes: H01L 2924/01077 Iridium [Ir]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/09701 : Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/12044 : OLED
• CPC Class Codes: H01L 2924/19103 : interposed between the semiconductor or solid-state device and the die mounting substrate, i.e. chip-on-passive
• CPC Class Codes: H01L 2924/19104 : on the semiconductor or solid-state device, i.e. passive-on-chip
• CPC Class Codes: H01L 2924/19105 : in a side-by-side arrangement on a common die mounting substrate
• CPC Class Codes: H01L 2924/3011 : Impedance
• CPC Class Codes: H05K 1/0259 : Electrostatic discharge [ESD] protection
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10T 29/49105 : Switch making
• CPC Class Codes: Y10T 29/49117 : Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49124 : On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49204 : Contact or terminal manufacturing

Abstract

Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.

Claims

1. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit coupled to an input pad from an ESD-induced voltage of positive or negative polarity, comprising:

a nanotube switch having at least two terminals coupled to the protected circuit and to a single discharge path;

wherein the nanotube switch, in response to the ESD-induced voltage, switches between a de-activated state and an activated state;

wherein the activated state creates a current path in either direction between the at least two terminals, so that a signal on the input pad flows to or from the single discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit,

wherein the nanotube switch returns to the de-activated state after the duration of the ESD-induced voltage.

2. The ESD protection circuit of claim 1 wherein the nanotube switch, the input pad, and the protected circuit are on a semiconductor chip.

3. The ESD protection circuit of claim 1 wherein the nanotube switch is on a chip carrier.

4. The ESD protection circuit of claim 1 wherein the deactivated and activated states are volatile states.

5. The ESD protection circuit of claim 1 wherein the nanotube switch is a three terminal device, with a first terminal coupled to the input pad, a second terminal coupled to the single discharge path, and a third terminal coupled to a control signal.

6. The ESD protection circuit of claim 5 wherein the deactivated and activated states are non-volatile states.

7. The ESD protection circuit of claim 1 wherein the ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit.

8. The ESD protection circuit of claim 1 wherein the nanotube switch provides protection based on the magnitude of the signal on the input pad.

9. The ESD protection circuit of claim 1 wherein the nanotube switch is a two terminal switch with one terminal coupled to the input pad and another terminal coupled to the single discharge path, and wherein the nanotube switch includes a nanotube element that is in communication with the one terminal and is activatable into communication with the other terminal.

10. An electrostatic discharge (ESD) protection circuit coupled to an input pad for protecting from an ESD-induced voltage of positive or negative polarity a protected circuit also coupled to the input pad, said ESD protection circuit comprising:

a nanotube switch having at least two terminals and an electrical control, a first of the at least two terminals being electrically coupled to the input pad and protected circuit and a second of the at least two terminals being coupled to a single discharge path;

wherein the nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state;

wherein the de-activated state presents a relatively high impedance between the first and second terminals of the nanotube switch so that a signal on the input pad passes to the protected circuit substantially unaltered;

wherein the activated state presents a relatively low impedance between the first and second terminals of the nanotube switch creating a current path in either direction between the at least two terminals, so that a signal on the input pad flows to or from the single discharge path coupled to the second terminal;

wherein the nanotube switch includes a nanotube element having a plurality of nanotubes, wherein the nanotube element is sized to produce the relatively low impedance of the nanotube switch in the activated state, said relatively low impedance being sufficient to cause the signal at the input pad to remain within a predefined operable range for the protected circuit.

11. The ESD circuit of claim 10 wherein the nanotube switch, the input pad, and the protected circuit are on a semiconductor chip.

12. The ESD circuit of claim 10 wherein the nanotube switch is on a chip carrier.

13. The ESD circuit of claim 10 wherein the deactivated and activated states are volatile states.

14. The ESD circuit of claim 10 wherein the nanotube switch is an electromechanical switch and wherein the activated and de-activated states correspond to physical positions of an electromechanically-movable nanotube element.

15. The ESD circuit of claim 14 wherein the control of the nanotube switch includes a release electrode which in response to electrical stimulation electrostatically attracts the nanotube element into contact with the second terminal of the nanotube switch.

16. The ESD circuit of claim 14 wherein the control is in electrical communication with the input pad so that a signal on the input pad outside of the predefined operable range causes the control to activate the nanotube switch to create a relatively low impedance path to the single discharge path.

17. The ESD circuit of claim 10 wherein the ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit.

18. The ESD circuit of claim 10 wherein the nanotube switch provides protection based on the magnitude of the signal on the input pad.

19. The ESD circuit of claim 10 wherein the nanotube switch is a two terminal switch with one terminal coupled to the input pad and another terminal coupled to the single discharge path, and wherein the nanotube switch includes a nanotube element that is in communication with the one terminal and is activatable into communication with the other terminal.

20. An electrostatic discharge (ESD) protection circuit coupled to an input pad for protecting from an ESD-induced voltage of positive or negative polarity a protected circuit also coupled to the input pad, said ESD protection circuit comprising:

a nanotube switch having a nanotube element and a control electrode, the nanotube element being electrically coupled to a single discharge path and the control electrode being electrically coupled to the input pad and protected circuit;

wherein the nanotube switch is controllable, in response to electrical stimulation of the control electrode, between a de-activated state and an activated state;

wherein the nanotube switch, in response to the ESD-induced voltage, switches between a de-activated state and an activated state and returns to the dc-activated state after the duration of the ESD-induced voltage;

wherein the activated state creates a current path in either direction between the input pad and the single discharge path, so that a signal on the input pad flows to or from the single discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit.

21. The ESD protection circuit of claim 20 wherein the nanotube switch, the input pad, and the protected circuit are on a semiconductor chip.

22. The ESD protection circuit of claim 20 wherein the nanotube switch is on a chip carrier.

23. The ESD protection circuit of claim 20 wherein the deactivated and activated states are non-volatile states.

24. The ESD protection circuit of claim 20 wherein the deactivated and activated states are volatile states.

25. The ESD protection circuit of claim 20 wherein the ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit.

26. The ESD protection circuit of claim 20 wherein the nanotube switch provides protection based on the magnitude of the signal on the input pad.

27. The ESD protection circuit of claim 20 wherein the nanotube switch further comprises a release electrode electrically coupled to a common mode connector.

28. The ESD protection circuit of claim 20 wherein the nanotube switch is switched to the de-activated state after the duration of the ESD-induced voltage by using electrical stimulus.

29. The ESD protection circuit of claim 20 wherein the nanotube switch is switched to the de-activated state after the duration of the ESD-induced voltage without using electrical stimulus.