Pressure sensor with dual chambers
First Claim
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1. A capacitive pressure sensor comprising:
- a substrate assembly having a first substrate bonded to a second substrate via an intermediate bonding layer so as to define sealed channels in the first substrate;
a conductive layer on the first substrate;
a conductive membrane extending from the first substrate and spaced from the conductive layer to form a capacitor and a sealed reference chamber having said sealed channels; and
a cap defining apertures, and extending from the first substrate to cover the membrane and form an apertured chamber.
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Abstract
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.
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Citations
9 Claims
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1. A capacitive pressure sensor comprising:
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a substrate assembly having a first substrate bonded to a second substrate via an intermediate bonding layer so as to define sealed channels in the first substrate; a conductive layer on the first substrate; a conductive membrane extending from the first substrate and spaced from the conductive layer to form a capacitor and a sealed reference chamber having said sealed channels; and a cap defining apertures, and extending from the first substrate to cover the membrane and form an apertured chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification