Method and apparatus for processing metal bearing gases

• US 7,569,790 B2
• Filed: 11/08/2005
• Issued: 08/04/2009
• Est. Priority Date: 06/26/1997
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Chen, Xing, Smith, John A., Smith, Donald K., Holber, William M.
• Primary Examiner(s): Paschall; Mark H
• Application Number:
  US11/269,917
• Publication Number:
  US 20060086699A1
• Time in Patent Office: 1,365 Days
• Field of Search: 219/121.4, 219/121.41, 219/121.43, 219/121.54, 219/121.57, 219/121.52, 118/723.I, 118/723.R, 156/345.48
• US Class Current: 219/121.41
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/4652 using inductive coupling means, e.g. coils

Abstract

A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Claims

1. A method for processing metal bearing gases, the method comprising:

receiving a metal bearing gas in a plasma chamber at pressure via an inlet; and

forming a toroidal plasma inside the plasma chamber, by passing current, generated by a solid state switching power supply comprising one or more switching semiconductor devices, through a primary winding of a transformer having a magnetic core surrounding a portion of the plasma chamber, the toroidal plasma reacting with the metal bearing gas to produce at least one of a metallic material, a metal oxide material or a metal nitride material.

2. The method of claim 1, comprising providing at least a second gas to the plasma chamber.

3. The method of claim 2, comprising producing a metal oxide material or a metal nitride material by the interaction of the plasma, the metal bearing gas and the second gas.

4. The method of claim 1, comprising outputting the at least one of a metallic material, a metal oxide material or a metal nitride material from the plasma chamber.

5. The method of claim 1, comprising collecting the at least one of a metallic material, a metal oxide material or a metal nitride material produced by the interaction of the plasma with the metal bearing gas.

6. The method of claim 1, comprising filtering the at least one of a metallic material, a metal oxide material or a metal nitride material from an output of the plasma chamber.