Integrated circuit using complementary junction field effect transistor and MOS transistor in silicon and silicon alloys
First Claim
1. A junction field effect transistor, comprising:
- a semiconductor substrate;
a first impurity region of a first conductivity type which is formed in the substrate;
a second impurity region of the first conductivity type which is formed in the substrate and spaced apart from the first impurity region;
a channel region of the first conductivity type which is located between the first and second impurity regions, wherein the channel region has a maximum length of less than 100 nm;
a gate electrode region of a second conductivity type which is formed above the top surface of the semiconductor substrate; and
a gate region of the second conductivity type which is formed in the substrate;
wherein the channel region has sidewalls that are substantially aligned with sidewalls of the gate electrode region and with sidewalls of the gate region.
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Abstract
This invention describes a method of building complementary logic circuits using junction field effect transistors in silicon. This invention is ideally suited for deep submicron dimensions, preferably below 65 nm. The basis of this invention is a complementary Junction Field Effect Transistor which is operated in the enhancement mode. The speed-power performance of the JFETs becomes comparable with the CMOS devices at sub-70 nanometer dimensions. However, the maximum power supply voltage for the JFETs is still limited to below the built-in potential (a diode drop). To satisfy certain applications which require interface to an external circuit driven to higher voltage levels, this invention includes the structures and methods to build CMOS devices on the same substrate as the JFET devices.
32 Citations
66 Claims
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1. A junction field effect transistor, comprising:
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a semiconductor substrate; a first impurity region of a first conductivity type which is formed in the substrate; a second impurity region of the first conductivity type which is formed in the substrate and spaced apart from the first impurity region; a channel region of the first conductivity type which is located between the first and second impurity regions, wherein the channel region has a maximum length of less than 100 nm; a gate electrode region of a second conductivity type which is formed above the top surface of the semiconductor substrate; and a gate region of the second conductivity type which is formed in the substrate; wherein the channel region has sidewalls that are substantially aligned with sidewalls of the gate electrode region and with sidewalls of the gate region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. An electronic circuit comprising one or more devices wherein at least one device in the electronic circuit comprises a junction field effect transistor that comprises:
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a semiconductor substrate; a first impurity region of a first conductivity type which is formed in the substrate; a second impurity region of the first conductivity type which is formed in the substrate and spaced apart from the first impurity region; a channel region of the first conductivity type which is located between the first and second impurity regions, wherein the channel region has a maximum length of less than 100 nm; a gate electrode region of a second conductivity type which is formed above the top surface of the semiconductor substrate; and a gate region of the second conductivity type which is formed in the substrate; wherein the channel region has sidewalls that are substantially aligned with sidewalls of the gate electrode region and with sidewalls of the gate region. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66)
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Specification