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Monolithic microwave integrated circuit (MMIC) waveguide resonators having a tunable ferroelectric layer

  • US 7,570,137 B2
  • Filed: 11/14/2005
  • Issued: 08/04/2009
  • Est. Priority Date: 11/14/2005
  • Status: Active Grant
First Claim
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1. A monolithic resonator, comprising:

  • a waveguide defining a resonator cavity located within a three-dimensional integrated circuit chip, wherein the resonator cavity has a height, width and length, and at least one of the width and length is greater than 200 micrometers;

    means for electromagnetically coupling the resonator cavity to other components in the integrated circuit chip;

    a ferroelectric layer located in the resonator cavity; and

    means for voltage biasing the ferroelectric layer to effect a desired change in resonator frequency characteristics, whereby the resonator is electronically tunable.

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