Monolithic microwave integrated circuit (MMIC) waveguide resonators having a tunable ferroelectric layer
First Claim
1. A monolithic resonator, comprising:
- a waveguide defining a resonator cavity located within a three-dimensional integrated circuit chip, wherein the resonator cavity has a height, width and length, and at least one of the width and length is greater than 200 micrometers;
means for electromagnetically coupling the resonator cavity to other components in the integrated circuit chip;
a ferroelectric layer located in the resonator cavity; and
means for voltage biasing the ferroelectric layer to effect a desired change in resonator frequency characteristics, whereby the resonator is electronically tunable.
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Abstract
A ferroelectric loaded waveguide resonator capable of operation at microwave, millimeter-wave and higher frequencies and suitable for integration into a three-dimensional monolithic microwave integrated circuit (3D MMIC) is disclosed. The resonator includes a resonator cavity, which, in one form of the invention, is formed by two parallel metal layers and a metallized wall structure extending between the metal layers. The cavity is filled with dielectric material and includes a layer of ferroelectric material, which is used to control the resonant frequency by varying a voltage bias applied to the ferroelectric layer. The cavity includes a slot in one of the metal layers and a coupling strip formed adjacent to the slot to provide electromagnetic coupling to other components, such as a voltage controlled oscillator (VCO). The invention can also be applied to other multi-metal semiconductor or wafer level packaging technologies.
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Citations
16 Claims
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1. A monolithic resonator, comprising:
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a waveguide defining a resonator cavity located within a three-dimensional integrated circuit chip, wherein the resonator cavity has a height, width and length, and at least one of the width and length is greater than 200 micrometers; means for electromagnetically coupling the resonator cavity to other components in the integrated circuit chip; a ferroelectric layer located in the resonator cavity; and means for voltage biasing the ferroelectric layer to effect a desired change in resonator frequency characteristics, whereby the resonator is electronically tunable. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 13)
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11. A three-dimensional monolithic microwave integrated circuit (3D MMIC) chip, comprising:
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a voltage controlled oscillator (VCO); and a radio frequency resonator, integrated into a common 3D MMIC chip with the VCO wherein the radio frequency resonator further comprises; a resonator cavity; a ferroelectric layer within the resonator cavity that traverses an entire surface of the resonator cavity; means supplying electromagnetic coupling between the resonator and the VCO; and means for varying the frequency of operation of the resonator by varying a bias voltage applied to the ferroelectric layer.
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14. A method for fabricating an electronically tunable three-dimensional monolithic microwave integrated circuit (3D MMIC) chip, comprising:
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forming a waveguide defining a resonator cavity located within the 3D MMIC chip comprising; forming a first metal layer; forming a dielectric region overlying the first metal layer; forming a ferroelectric layer within the dielectric region; and forming a second metal layer overlying the dielectric region and the ferroelectric layer, thereby defining the resonator cavity such that the ferroelectric layer resides within the resonator cavity; forming a coupling to the resonator cavity; and electromagnetically coupling the waveguide to other components in the 3D MMIC chip. - View Dependent Claims (15, 16)
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Specification