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System and method of testing humidity in a sealed MEMS device

  • US 7,570,865 B2
  • Filed: 01/28/2008
  • Issued: 08/04/2009
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. A method of testing humidity, comprising:

  • measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor;

    comparing the weights of the first and second devices; and

    determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison.

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