System and method of testing humidity in a sealed MEMS device

• US 7,570,865 B2
• Filed: 01/28/2008
• Issued: 08/04/2009
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Gally, Brian J., Palmateer, Lauren, Cummings, William J., Kothari, Manish
• Primary Examiner(s): Pak; Sung H
• Application Number:
  US12/021,218
• Publication Number:
  US 20080115596A1
• Time in Patent Office: 554 Days
• Field of Search: None
• US Class Current: 385/147
• CPC Class Codes: B81C 99/0045 End test of the packaged device
• CPC Class Codes: G01M 3/002 by using thermal means
• CPC Class Codes: G01M 3/02 by using fluid or vacuum
• CPC Class Codes: G01M 3/186 for containers, e.g. radiators
• CPC Class Codes: G01M 3/229 removably mounted in a test cell
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

One embodiment provides a method of testing humidity. The method includes measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor. The method further includes comparing the weights of the first and second devices and determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison. In one embodiment, the relative humidity value or degree is determined considering at least one of the following parameters: i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

Claims

1. A method of testing humidity, comprising:

measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor;

comparing the weights of the first and second devices; and

determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison.

2. The method of claim 1, further comprising:

determining the difference between the first and second weights; and

determining that the device is defective or has a shortened lifetime if the difference is greater than a threshold value.

3. The method of claim 1, wherein the relative humidity value or degree is determined considering at least one of the following parameters:

i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

4. The method of claim 1, wherein the second device includes a plurality of devices each enclosing a plurality of interferometric modulators, at least one of the plurality of devices containing a different amount of water vapor from that of the first device, and wherein the second weight is an average weight of the plurality of devices.

5. The method of claim 1, wherein the second device is the same as the first device, and wherein the measuring of the second weight is performed after a predetermined period of time from the first weight measurement.

6. A system for testing humidity, comprising:

a first device enclosing a plurality of interferometric modulators;

a second device enclosing a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor; and

a scale configured to measure the weights of the first and second devices,

wherein a relative humidity value or a degree of the relative humidity inside one of the two devices is determined based at least in part upon the measured weights.

7. The system of claim 6, wherein the relative humidity value or degree is determined considering at least one of the following parameters:

i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

8. The system of claim 6, wherein the scale is accurate to about ±

0.1 mg.

9. The system of claim 6, wherein the scale is accurate to about ±

0.05 mg.

10. A method of testing humidity, comprising:

providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant;

measuring a first weight of the device;

providing water vapor into the inside of the device;

measuring a second weight of the device after the water vapor has been provided into the device;

comparing the first and second weights; and

determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the weight comparison.

11. The method of claim 10, wherein the device includes a desiccant, and wherein the method further comprises determining that the desiccant is not working properly if the second weight is substantially the same as the first weight.

12. The method of claim 10 further comprising defining a hole at least one of the following area:

a seal, a backplate, and a substrate of the device, and wherein the water vapor is provided into the device via the hole.

13. The method of claim 10, wherein the relative humidity value or degree is determined considering at least one of the following parameters:

i) temperature-humidity combination inside the device, ii) the thickness and width of a seal of the device, iii) adhesive permeability of a component of the device, iv) a desiccant capacity inside the device and v) a device size.

14. A system for testing humidity, comprising:

means for measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor;

means for comparing the weights of the first and second devices; and

means for determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison.

15. The system of claim 14, wherein the relative humidity value or degree is determined considering at least one of the following parameters:

i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

16. The system of claim 14, wherein the second device includes a plurality of devices each enclosing a plurality of interferometric modulators, at least one of the plurality of devices containing a different amount of water vapor from that of the first device, and wherein the second weight is an average weight of the plurality of devices.

17. The system of claim 14, wherein the second device is the same as the first device, and wherein the measuring of the second weight is performed after a predetermined period of time from the first weight measurement.

18. A system for testing humidity, comprising:

means for providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant;

means for measuring a first weight of the device;

means for providing water vapor into the inside of the device;

means for measuring a second weight of the device after the water vapor has been provided into the device;

means for comparing the first and second weights; and

means for determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the weight comparison.

19. The system of claim 18, wherein the device includes a desiccant, and wherein the system further comprises means for determining that the desiccant is not working properly if the second weight is substantially the same as the first weight.

20. The system of claim 18, wherein the relative humidity value or degree is determined considering at least one of the following parameters:

i) temperature-humidity combination inside the device, ii) the thickness and width of a seal of the device, iii) adhesive permeability of a component of the device, iv) a desiccant capacity inside the device and v) a device size.