Column simultaneously focusing a particle beam and an optical beam
First Claim
1. A method for treating a sample by means using a column combining charged particle beam and an optical beam, comprising:
- providing a column having an electrostatic lens comprising an entry aperture at a top section and an exit aperture at a bottom section, the electrostatic lens incorporating a convex optical mirror and a concave optical mirror;
locating a sample below the column;
passing a particle beam through the entry aperture and exit aperture of the electrostatic lens so as to be focused on a selected location on the sample;
injecting an optical beam into the electrostatic lens through the entry aperture, so as to reflect from the convex optical mirror towards the concave optical mirror and then reflect from the concave optical mirror to exit from the exit aperture so as to be focused on the selected location on the sample.
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Accused Products
Abstract
Column for simultaneously producing a focused particle beam and a focused light beam and method for treating a sample using the column. The column has lateral walls, an input electrode having a particle aperture for emitting a particle beam, an electrostatic lens, an optical focusing device within the lens, and a deflection optical mirror. The method comprises locating the sample below the column, passing the particle beam through entry aperture and exit aperture of the lens to be focused on a selected location on the sample, and injecting an optical beam into the lens through the entry aperture. The lens incorporates convex and concave optical mirrors. The optical beam is injected into the lens to reflect from the convex optical mirror towards the concave optical mirror and then reflect from the concave optical mirror to exit from the exit aperture to be focused on the selected location on the sample.
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Citations
19 Claims
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1. A method for treating a sample by means using a column combining charged particle beam and an optical beam, comprising:
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providing a column having an electrostatic lens comprising an entry aperture at a top section and an exit aperture at a bottom section, the electrostatic lens incorporating a convex optical mirror and a concave optical mirror; locating a sample below the column; passing a particle beam through the entry aperture and exit aperture of the electrostatic lens so as to be focused on a selected location on the sample; injecting an optical beam into the electrostatic lens through the entry aperture, so as to reflect from the convex optical mirror towards the concave optical mirror and then reflect from the concave optical mirror to exit from the exit aperture so as to be focused on the selected location on the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A column for simultaneously producing a focused particle beam and a focused light beam, the column comprising:
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lateral walls; an input electrode situated within the lateral walls and having a particle aperture for emitting a particle beam; an electrostatic lens situated within the lateral walls and positioned to receive the particle beam from the particle aperture of the input electrode; an optical focusing device positioned within the electrostatic lens, the optical focusing device having a convex mirror and a concave mirror, the convex mirror having a through-hole at the center thereof allowing passage of the particle beam there-through, the convex mirror facing the concave mirror; a deflection optical mirror situated between the input electrode and the concave mirror and having an aperture for passage of the particle beam, the deflection mirror positioned to deflect optical beam towards the convex mirror through the through-hole of the concave mirror. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification