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Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure

  • US 7,574,787 B2
  • Filed: 02/28/2006
  • Issued: 08/18/2009
  • Est. Priority Date: 02/25/2003
  • Status: Expired due to Fees
First Claim
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1. A method of producing at least one piezoelectric element comprising:

  • depositing a piezoelectric ceramic material onto a first surface of at least one first reusable single layer substrate structure to form at least one piezoelectric element structure, wherein a first surface of the piezoelectric ceramic material and the first surface of the first reusable single layer substrate are in direct contact;

    depositing an electrode on a second surface of the at least one piezoelectric element structure;

    bonding the at least one piezoelectric element structure to a second substrate, the second substrate being conductive or having a conductive layer;

    removing the at least one first reusable single layer substrate from the at least one piezoelectric element structure;

    depositing a second side electrode on the first surface of the at least one piezoelectric element structure; and

    poling, by applying a DC voltage to the at least one piezoelectric element structure, to provide the at least one piezoelectric element structure with piezoelectric characteristics.

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