Curved slit valve door

• US 7,575,220 B2
• Filed: 06/14/2004
• Issued: 08/18/2009
• Est. Priority Date: 06/14/2004
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lewis, Gregory S., Tanase, Yoshiaki, Leung, Billy C., Berkstresser, David E.
• Primary Examiner(s): Fristoe, Jr.; John K
• Application Number:
  US10/867,100
• Publication Number:
  US 20050274923A1
• Time in Patent Office: 1,891 Days
• Field of Search: 251/177, 251/301, 251/303, 251/334, 251/176, 251/192, 251/193, 251/333, 49/40, 49/41, 414/221
• US Class Current: 251/177
• CPC Class Codes: F16K 1/2261 the sealing being arranged on the valve member
• CPC Class Codes: F16K 1/24 with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.

Claims

1. A vacuum chamber having an apparatus for sealing a substrate transfer passage, comprising:

a chamber body having a first interior volume;

a flat sealing surface surrounding a first substrate transfer port defined through the chamber body and configured to allow passage of a large area substrate therethrough; and

a door member having a convex sealing face relative to the flat sealing surface, wherein the door member is moveable between a first position that covers the first substrate transfer port and a second position clear of the first substrate transfer port.

2. The vacuum chamber of claim 1, wherein the convex sealing face further comprises:

a seal gland formed in the convex sealing face proximate a peripheral edge of the door member and circumscribing an inner region of the door member.

3. The vacuum chamber of claim 2, further comprising:

a fluoropolymer seal disposed in the seal gland.

4. The vacuum chamber of claim 1, further comprising:

a first shaft extending through the chamber body; and

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of a backside of the door member.

5. The vacuum chamber of claim 1, wherein the door member is substantially rectangular and has a width of at least about 1260 millimeters.

6. The vacuum chamber of claim 1, further comprising:

a second substrate transfer port disposed through the chamber body to the first interior volume.

7. The vacuum chamber of claim 6, further comprising:

a second interior volume formed in the chamber body vertically stacked above the first interior volume and adapted to accommodate a large area substrate therein;

a third substrate transfer port disposed through the chamber body to the second interior volume; and

a fourth substrate transfer port disposed through the chamber body to the second interior volume.

8. The vacuum chamber of claim 1, further comprising:

a flat sealing surface surrounding a second substrate transfer port disposed through the chamber body to the first interior volume; and

a pressure control system coupled to the chamber body and adapted to control the pressure of the first interior volume of the chamber body.

9. The vacuum chamber of claim 8, wherein the convex sealing face further comprises:

a seal gland formed in the convex sealing face proximate a peripheral edge of the door member and circumscribing an inner region of the door member.

10. The vacuum chamber of claim 9, further comprising:

a fluoropolymer seal disposed in the seal gland.

11. The vacuum chamber of claim 8, further comprising:

a first shaft extending through the chamber body; and

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of a backside of the door member.

12. The vacuum chamber of claim 11, further comprising:

a first mounting assembly coupled to the backside of the door member;

a first internal actuator arm coupled the first shaft; and

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft; and

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm.

13. The vacuum chamber of claim 12, wherein the chamber body has

a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm, and

a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

14. The vacuum chamber of claim 12, further comprising:

a first actuator coupled to the first shaft; and

a second actuator coupled to the second shaft, wherein the first and second actuators are adapted to rotate the door member about the first and second shafts.

15. The vacuum chamber of claim 8, further comprising:

a spring coupled to the door member and adapted to urge the door member to a predefined orientation relative to the chamber body when the door member is in the first position.

16. The vacuum chamber of claim 8, wherein a width of the first substrate transfer port is at least about 1365 millimeters.

17. The vacuum chamber of claim 8, further comprising:

a second interior volume disposed in the chamber body vertically stacked above the first interior volume and adapted to accommodate a large area substrate.

18. The vacuum chamber of claim 17, further comprising:

a third substrate access port disposed through the chamber body to the second interior volume; and

a fourth substrate access port disposed through the chamber body to the second interior volume.

19. The vacuum chamber of claim 1, wherein the convex sealing face of the door member is convex relative to a major axis of the door member, and is deformable to a flattened shape when the door member is placed in contact with the flat sealing surface surrounding the first substrate transfer port.

20. The vacuum chamber of claim 1, wherein the door member is substantially rectangular and has a width of at least about 1260 millimeters along a major axis.

21. The vacuum chamber of claim 20, wherein the convex sealing face further comprises:

a seal gland formed in the convex sealing face proximate the major and minor edges of the door member and circumscribing an inner region of the door member.

22. The vacuum chamber of claim 1, wherein the convex sealing face is convex relative to a major axis of the door member.

23. A vacuum chamber having an apparatus for sealing a substrate transfer passage, comprising:

a vacuum chamber body having first interior volume and a flat sealing surface surrounding a first substrate transfer port defined through the chamber body and configured to allow passage of a large area substrate therethrough;

a flexible door member having a convex sealing face movable between a first position that covers the first substrate transfer port and a second position clear of the first substrate transfer port; and

two mounting assemblies coupled to opposite ends of a backside of the flexible door member.

24. The vacuum chamber of claim 23, wherein the convex sealing face further comprises:

a seal gland formed in the convex sealing face proximate a peripheral edge of the door member and circumscribing an inner region of the flexible door member.

25. The vacuum chamber of claim 24, further comprising:

a fluoropolymer seal disposed in the seal gland.

26. The vacuum chamber of claim 23, wherein the flexible door member is substantially rectangular and has a width of at least about 1260 millimeters.

27. The vacuum chamber of claim 23, further comprising:

a second substrate transfer port disposed through the chamber body to the first interior volume.

28. The vacuum chamber of claim 27, further comprising:

a second interior volume formed in the chamber body vertically stacked above the first interior volume and adapted to accommodate a large area substrate therein;

a third substrate transfer port disposed through the chamber body to the second interior volume; and

a fourth substrate transfer port disposed through the chamber body to the second interior volume.

29. A chamber having an apparatus for sealing a substrate transfer passage, comprising:

a chamber body having an interior volume;

at least one substrate transfer port defined through the chamber body and configured to allow passage of a large area substrate therethrough;

a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port

a first shaft extending through the chamber body;

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of the backside of the door member;

a first mounting assembly coupled to a backside of the door member;

a first internal actuator arm coupled to the first shaft;

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft;

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm;

a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm; and

a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

30. A load lock chamber having an apparatus for sealing a substrate transfer passage, comprising:

a chamber body having at least one substrate transfer chamber formed therein;

a first substrate transfer port and a second substrate transfer port disposed through the chamber body to the substrate transfer chamber;

a first door member having a convex sealing face and moveable between a first position that closes the first substrate transfer port and a second position clear of the first substrate transfer port;

a pressure control system coupled to the chamber body and adapted to control the pressure of the interior volume of the substrate transfer chamber;

a first shaft extending through the chamber body;

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of the backside of the door member;

a first mounting assembly coupled to a backside of the door member;

a first internal actuator arm coupled the first shaft;

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft;

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm;

a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm; and

a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

31. A vacuum chamber having an apparatus for sealing a substrate transfer passage, comprising:

a vacuum chamber body having an interior volume;

a flat sealing surface surrounding a substrate transfer port defined through the chamber body and configured to allow passage of a large area substrate therethrough;

a door member having a convex sealing face relative to the flat sealing surface, wherein the door member is moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port;

a first shaft extending through the chamber body;

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of a backside of the door member;

a first mounting assembly coupled to the backside of the door member;

a first internal actuator arm coupled to the first shaft;

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft; and

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm.

32. The vacuum chamber of claim 31, wherein the chamber body has a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm, and a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

33. The vacuum chamber of claim 31, further comprising:

a spring coupled to the door member and adapted to urge the door member to a predefined orientation relative to the first internal actuator arm.

34. The vacuum chamber of claim 31, further comprising:

a first actuator coupled to the first shaft; and

a second actuator coupled to the second shaft, wherein the first and second actuators are adapted to rotate the door member about the first and second shafts.