Modification of selectivity for sensing for nanostructure device arrays
First Claim
1. A method of fabricating a sensor for detecting a plurality of analytes, the method comprising:
- (a) forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises;
(i) a nanostructure,(ii) at least two contact electrodes in electrical communication via the nanostructure, and(iii) at least one structure selected from the group consisting of a protective coating disposed over the contact electrodes and a gate electrode in electrical communication with the nanostructure;
(b) adapting individual nanostructure sensing devices for sensitivity to different analytes of the plurality of analytes, wherein adapting individual nanostructure sensing devices comprises exposing at least some of the plurality of nanostructure sensing devices to a reactant, wherein the reactant is selected from the group consisting of a gas and an electrochemical solution; and
(c) forming signal connections to the individual nanostructure sensing devices, the signal connections adapted to transmit signals indicating responses of corresponding nanostructure sensing devices to the plurality of analytes.
0 Assignments
0 Petitions
Accused Products
Abstract
An electronic system for selectively detecting and identifying a plurality of chemical species, which comprises an array of nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the nanostructure sensing devices. Methods for fabricating the electronic system are also disclosed. The methods involve modifying nanostructures within the devices to have different selectivity for sensing chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the arrays of nanostructure sensing devices to detect and identify a plurality of chemical species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest with signals from nanostructure sensing devices that have been exposed to the chemical species of interest. Nanostructure sensing device array structures that can measure and subtract out environmental factors are also disclosed.
77 Citations
12 Claims
-
1. A method of fabricating a sensor for detecting a plurality of analytes, the method comprising:
-
(a) forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises; (i) a nanostructure, (ii) at least two contact electrodes in electrical communication via the nanostructure, and (iii) at least one structure selected from the group consisting of a protective coating disposed over the contact electrodes and a gate electrode in electrical communication with the nanostructure; (b) adapting individual nanostructure sensing devices for sensitivity to different analytes of the plurality of analytes, wherein adapting individual nanostructure sensing devices comprises exposing at least some of the plurality of nanostructure sensing devices to a reactant, wherein the reactant is selected from the group consisting of a gas and an electrochemical solution; and (c) forming signal connections to the individual nanostructure sensing devices, the signal connections adapted to transmit signals indicating responses of corresponding nanostructure sensing devices to the plurality of analytes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
Specification