Backside silicon wafer design reducing image artifacts from infrared radiation
First Claim
Patent Images
1. An imager comprising:
- a semiconductor substrate having a first surface and a second surface; and
an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of the substrate, said pixel cells including imaging pixel cells and dark current pixel cells;
wherein said second surface has surface abrasions formed therein for reducing the amount of light reflecting from said second surface back to said dark current pixel cells.
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Abstract
Imaging devices having reduced image artifacts are disclosed. The image artifacts in the imaging devices are reduced by redirecting, absorbing or scattering IR radiation that passes through the imaging device substrate away from dark pixels.
62 Citations
12 Claims
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1. An imager comprising:
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a semiconductor substrate having a first surface and a second surface; and an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of the substrate, said pixel cells including imaging pixel cells and dark current pixel cells; wherein said second surface has surface abrasions formed therein for reducing the amount of light reflecting from said second surface back to said dark current pixel cells. - View Dependent Claims (2)
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3. An imager comprising:
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a semiconductor substrate having a first surface and a second surface; and an array of pixel sensor cells comprising a plurality of pixel cells formed at a first surface of the substrate, said pixel cells including imaging pixel cells and dark current pixel cells; wherein said second surface has surface abrasions that include shaped gratings formed therein for reducing the amount of light reflecting from said second surface back to said dark current pixel cells. - View Dependent Claims (4, 5)
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6. An imager comprising:
an array of pixel sensor cells comprising a plurality of active pixel cells and dark current pixel cells formed at a first surface of a substrate, wherein said active pixel cells and said dark current pixel cells are separated in said substrate by a predetermined distance, wherein the predetermined distance is such that an amount of light reflecting from a second surface of the substrate back to said dark current pixel cells is reduced. - View Dependent Claims (7, 8, 9, 10, 11, 12)
Specification