Method and apparatus for maintaining a machine part

• US 7,576,831 B2
• Filed: 03/11/2004
• Issued: 08/18/2009
• Est. Priority Date: 03/11/2003
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Groos, Pieter Johannes Marius, Vermeulen, Johannes Petrus Martinus Bernardus, Loopstra, Erik Roelof, Hoogkamp, Jan Frederik, Vugts, Josephus Cornelius Johannes Antonius, Livesey, Robert Gordon, Klomp, Albert Jan Hendrik, Franssen, Johannes Hendrikus Gertrudis
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US10/797,664
• Publication Number:
  US 20050019709A1
• Time in Patent Office: 1,986 Days
• Field of Search: 355/53, 355/72, 438/795, 257/678
• US Class Current: 355/53
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: G03F 7/70975 Assembly, maintenance, transport or storage of apparatus
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Abstract

A method of and apparatus for maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure via a load lock. The method includes transporting a machine part via the load lock out of the interior space and transporting via the load lock into the interior space one of the maintained machine part and a separate replacement machine part.

Claims

1. A method of maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure by a load lock, the method comprising:

engaging the machine part with a first handler, wherein the first handler has either a plurality of tapered protrusions or a plurality of tapered grooves that substantially correspond to, respectively, a plurality of tapered grooves or a plurality of tapered protrusions located on the machine part;

transporting the machine part from the interior space to the load lock using the first handler;

disengaging the machine part from the first handler;

engaging the machine part with a second handler, wherein the second handler has either a plurality of tapered protrusions or a plurality of tapered grooves that substantially correspond to, respectively, a plurality of tapered grooves or a plurality of tapered protrusions located on the machine part;

transporting the machine part from the load lock to the environment using the second handler;

disengaging the machine part from the second handler;

performing maintenance on or replacement of the machine part;

engaging the machine part with the second handler;

transporting the maintained or replaced machine part from the environment to the load lock;

disengaging the machine part from the second handler;

engaging the machine part with the first handler; and

transporting the maintained or replaced machine part from the load lock to the interior space;

wherein the machine part is a substrate table configured to support a substrate or a gripper configured to grip and release the substrate and/or the substrate table.

2. The method of claim 1, wherein the machine part is transported from the environment through the load lock into the interior space after cleaning the machine part and the machine part is transported after being maintained from the environment through the load lock into the interior space.

3. The method of claim 1, wherein the separate replacement machine part is transported from the environment through the load lock into the interior space and the separate replacement machine part is a clean version of the machine part and the separate replacement machine part is transported from the environment through the load lock into the interior space as a clean version of the machine part.

4. The method of claim 1, where the machine part is connected to and disconnected from the machine via a connection system.

5. The method of claim 4, wherein the connection system self-aligns during connecting and disconnecting.

6. The method of claim 1, wherein the machine part is the substrate table and further comprising:

displacing the substrate table with respect to a chuck by a displacement mechanism.

7. The method of claim 6, wherein displacing the substrate table with respect to the chuck comprises:

moving at least one of a pin, that in a first position extends in a first direction through the substrate table, and the substrate table in a second direction, which is substantially perpendicular to the first direction, when the pin is at a second position that does not extend through the substrate table; and

displacing the substrate table with respect to the chuck by moving the pin in the first direction.

8. The method of claim 7, wherein the movement of the at least one of the pin and the substrate table in the second direction is a rotation.

9. The method of claim 6, wherein displacing the substrate table by the displacement mechanism includes:

providing the displacement mechanism having a pin, which in a first position can extend in a first direction through the substrate table, and that displaces the substrate table with respect to the chuck through movement of the pin in the first direction; and

a shifting mechanism moving at least one of the pin and the substrate table in a second direction, which is substantially perpendicular to the first direction, when the pin is at a second position that does not extend through the substrate table.

10. The method of claim 9, where said movement of said at least one of the pin and said substrate table in said second direction is a rotation.

11. The method of claim 1, where the machine is a lithographic projection apparatus configured to project a beam of radiation on the substrate.

12. The method of claim 11, wherein the transporting the machine part includes grasping the gripper arranged to grip and release the substrate and/or the substrate table.

13. An assembly having an interior space maintained at a first pressure and an environment having a second pressure, comprising:

a load lock separating the interior space from the environment;

a first handler, located at a first side of said load lock, having a first plurality of tapered protrusions or tapered grooves that substantially correspond to and engage a second plurality of tapered grooves or tapered protrusions located on a machine part;

a second handler, located at a second side of said load lock, having a third plurality of tapered protrusions or tapered grooves that substantially correspond to and engage the second plurality of tapered grooves or tapered protrusions of the machine part; and

means for maintaining the first pressure when said load lock is open to the interior space,

wherein said first handler is configured to transfer the machine part between the interior space to the load lock, and said second handler is configured to transfer the machine part between the load lock to the environment, and

wherein the machine part comprises one of a substrate table configured to support a substrate and a gripper configured to manipulate at least one of the substrate and the substrate table.

14. The assembly of claim 13 wherein said assembly is a lithographic projection apparatus comprising:

a radiation system configured to provide a beam of radiation;

a support structure to support a patterning device, said patterning device serving to pattern said beam according to a desired pattern; and

a projection system configured to project said patterned beam onto a target portion of said substrate.

15. The assembly of claim 13, further comprising:

a cleaning apparatus configured to clean said machine part outside said interior space to render it as said machine part after maintenance that can be transported from said environment into said interior space through said load lock.

16. The assembly of claim 13, wherein said separate replacement part is a clean version of said machine part that can be transported from said environment into said interior space through said load lock.

17. The assembly of claim 13, further comprising:

a connection system configured to connect and disconnect said machine part from said assembly.

18. The assembly of claim 17, wherein said connection system is configured to be self-aligning during connecting and disconnecting.

19. The assembly of claim 13, wherein said machine part is the substrate table and further comprising:

a displacement mechanism to displace the substrate table with respect to a chuck.