Lithographic apparatus and device manufacturing method

• US 7,576,834 B2
• Filed: 05/01/2008
• Issued: 08/18/2009
• Est. Priority Date: 05/30/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Leeuwen, Robbert Edgar, George, Richard Alexander, de Jager, Pieter Willem Herman, Burghoorn, Jacobus, Gui, Cheng-Qun
• Primary Examiner(s): Mathews; Alan A
• Application Number:
  US12/113,831
• Publication Number:
  US 20080218718A1
• Time in Patent Office: 474 Days
• Field of Search: 355/53, 355/55, 355/72, 355/77, 430/397, 430/311, 359/291
• US Class Current: 355/53
• CPC Class Codes: G03B 27/53 Automatic registration or positioning of originals with respect to each other or the photosensitive layer
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7026 Focusing

Abstract

A lithographic apparatus is provided. The lithographic apparatus includes a radiation source configured to provide radiation, an array of optical light engines, and a substrate table that supports a substrate. Each of the optical light engines includes an array of individually controllable elements arranged and constructed to receive and to pattern the radiation and projection optics configured to receive the patterned radiation and to project the patterned radiation onto the substrate. The substrate table is arranged and constructed to move relative to the array of optical light engines during exposure of the substrate to the patterned radiation.

Claims

1. A lithographic apparatus, comprising:

a radiation source configured to provide radiation;

an array of optical light engines, each of the optical light engines comprising;

an array of individually controllable elements arranged and constructed to receive and to pattern the radiation, and

projection optics configured to receive the patterned radiation and to project the patterned radiation onto a substrate; and

a substrate table that supports the substrate;

wherein a spacing between adjacent optical engines is greater than a spacing between adjacent elements of each array of individually controllable elements;

wherein the substrate table is arranged and constructed to move relative to the array of optical light engines during exposure of the substrate to the patterned radiation.

2. The apparatus of claim 1, wherein the substrate table is arranged and constructed to move in a direction perpendicular to the array of optical light engines during exposure of the substrate to the patterned radiation.

3. The apparatus of claim 1, wherein a full width of the substrate is exposed to the patterned radiation in a single pass.

4. The apparatus of claim 1, wherein each of the light engines comprises a microlens array.

5. The apparatus of claim 1, wherein the substrate is a glass substrate.

6. The apparatus of claim 1, wherein the substrate comprises a photosensitive layer.

7. The apparatus of claim 1, wherein the substrate is used to form a flat panel display.

8. The lithographic apparatus of claim 1, further comprising:

an array of actuators, wherein each actuator controls a position of a respective optical light engine.

9. A lithographic apparatus, comprising:

a radiation source configured to provide radiation;

an array of optical light engines, each of the optical light engines comprising;

an array of individually controllable elements arranged and constructed to receive and to pattern the radiation, and

projection optics configured to receive the patterned radiation and to project the patterned radiation onto a substrate; and

a substrate table configured to support the substrate;

wherein a spacing between adjacent optical engines is greater than a spacing between adjacent elements of each array of individually controllable elements;

wherein the array of optical light engines is arranged and constructed to move relative to the substrate table during exposure of the substrate to the patterned radiation.

10. The apparatus of claim 9, wherein a full width of the substrate is exposed to the patterned radiation in a single pass.

11. The apparatus of claim 9, wherein each of the light engines comprises a microlens array.

12. The apparatus of claim 9, wherein the substrate is a glass substrate.

13. The apparatus of claim 9, wherein the substrate comprises a photosensitive layer.

14. The apparatus of claim 9, wherein the substrate is used to form a flat panel display.

15. The lithographic apparatus of claim 9, further comprising:

an array of actuators, wherein each actuator controls a position of a respective optical light engine.

16. A lithographic apparatus, comprising:

optical light engines, each of the optical light engines comprising,

an emitting portion configured to emit a patterned beam,

an array of individually controllable elements arranged and constructed to receive radiation and generate respective portions of the patterned beam, and

a projection system configured to direct the patterned beam onto a substrate; and

a substrate table configured to support the substrate;

wherein a spacing between adjacent optical engines is greater than a spacing between adjacent elements of each array of individually controllable elements;

wherein the apparatus is arranged and constructed such that the substrate table moves relative to the optical light engines during exposure of the substrate.

17. The apparatus of claim 16, wherein the substrate table is arranged and constructed to move in a direction perpendicular to the optical light engines during exposure of the substrate.

18. The apparatus of claim 16, wherein a full width of the substrate is exposed to the patterned beam in a single pass.

19. The apparatus of claim 16, wherein each of the optical light engines further comprises a microlens array located between the projection system and the substrate table.

20. The apparatus of claim 16, wherein the substrate is a glass substrate used to form a flat panel display.

21. The apparatus of claim 16, wherein each of the emitting portions comprises:

an array of individually controllable elements arranged and constructed to receive radiation and generate respective portions of the patterned beam.

22. The apparatus of claim 16, wherein each of the emitting portions comprises:

an array of radiation generating elements configured to generate respective portions of the patterned beam.

23. The apparatus of claim 16, wherein the substrate table is substantially stationary and optical engines are arranged and constructed to move during exposure of the substrate.

24. The apparatus of claim 16, wherein the optical engines are substantially stationary and the substrate table is arranged and constructed to move during exposure of the substrate.

25. The apparatus of claim 16, wherein the optical engines and the substrate table are arranged and constructed configured to move in opposite directions during exposure of the substrate.

26. The lithographic apparatus of claim of claim 16, further comprising:

an array of actuators, wherein each actuator controls a position of a respective optical light engine.