Substrate handler, lithographic apparatus and device manufacturing method

• US 7,576,835 B2
• Filed: 07/06/2005
• Issued: 08/18/2009
• Est. Priority Date: 07/06/2005
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hazenberg, Johannes Martinus Andreas, Van Beuzekom, Aart Adrianus, Luttikhuis, Bernardus Antonius Johannes, Jacobs, Hernes, Van Der Schoot, Harmen Klaas, Vosters, Petrus Matthijs Henricus
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/175,037
• Publication Number:
  US 20070008512A1
• Time in Patent Office: 1,504 Days
• Field of Search: 355/30, 355/53, 355 72- 76, 118722-725
• US Class Current: 355/72
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature

Abstract

Embodiments of the invention relates to a substrate handler for handling a substrate, including a conditioning device for conditioning the substrate. In an embodiment, the substrate handler includes a displacing device configured to displace the substrate in a direction substantially parallel to the support surface, wherein the displacing device is configured to displace the substrate during the conditioning process from one conditioning position to one or more other conditioning positions. According to another embodiment of the invention, the substrate handler includes a float device for providing an air bed above a support surface of the substrate handler, the substrate handler being configured to support the substrate on an air bed during conditioning of the substrate.

Claims

1. A substrate handler comprising:

a support configured to receive a substrate on a support surface;

a conditioning device configured to condition said substrate through the support surface;

a float device configured to provide an air bed above the support surface, said float device configured to float said substrate on said air bed during conditioning of said substrate; and

a displacing device configured to displace said substrate, during the conditioning process, from one conditioning position to one or more other conditioning positions.

2. The substrate handler of claim 1, wherein said displacing device is configured to constantly move said substrate during said conditioning process.

3. The substrate handler of claim 1, wherein said displacing device comprises a gripping device configured to grip said substrate for moving said substrate in a direction substantially parallel to said support surface.

4. The substrate handler of claim 1, wherein said float device is configured to maintain a float height of about 0.01-0.15 mm above said support surface during said conditioning process.

5. The substrate handler of claim 4, wherein said float height is in a range of about 0.025-0.075 mm above said support surface.

6. The substrate handler of claim 1, wherein said float device is configured to float said substrate at a float height of at least about 0.15 mm.

7. The substrate handler of claim 6, wherein said float height is at least about 0.20 mm.

8. A substrate handler for handling a substrate, comprising:

a support configured to receive the substrate on a support surface;

a conditioning device configured to thermally condition said substrate; and

a float device configured to provide an air bed above the support surface of said substrate handler, said float device configured to float said substrate on said air bed during thermal conditioning of said substrate through the support surface; and

a displacing device configured to displace said substrate, during the conditioning process, from one conditioning position to one or more other conditioning positions.

9. The substrate handler of claim 8, wherein said substrate handler comprises a displacing device configured to displace said substrate in a direction substantially parallel to said support surface.

10. A lithographic apparatus comprising:

an illumination system configured to condition a radiation beam;

an array of individually controllable elements configured to modulate a cross-section of the radiation beam;

a substrate table constructed to support a substrate;

a projection system configured to project the modulated radiation beam onto a target portion of the substrate supported on said substrate table, and

a substrate handler configured to load a substrate on said substrate table, the substrate handler comprising;

a support configured to receive the substrate on a support surface;

a conditioning device configured to thermally condition said substrate on the support surface; and

a displacing device configured to displace said substrate relative to the support surface in a direction substantially parallel to said support surface, during the conditioning process, from one conditioning position to one or more other conditioning positions.

11. A lithographic apparatus comprising:

an illumination system configured to condition a radiation beam;

an array of individually controllable elements configured to modulate a cross-section of the radiation beam;

a substrate table constructed to support a substrate;

a projection system configured to project the modulated radiation beam onto a target portion of the substrate supported on said substrate table, and

a substrate handler configured to load a substrate on said substrate table, the substrate handler comprising;

a support configured to receive the substrate on a support surface;

a conditioning device configured to thermally condition said substrate; and

a float device configured to provide an air bed above the support surface, said float device configured to float said substrate on said air bed during thermal conditioning of said substrate through the support surface.

12. A method for manufacturing a device comprising:

thermally conditioning a substrate supported on a support surface of a substrate handler, the thermal conditioning being performed through the support surface;

floating said substrate on an air bed above said support surface during conditioning of said substrate; and

displacing said substrate, during the conditioning process, from one conditioning position to one or more other conditioning positions.

13. The method of claim 12, wherein during said thermal conditioning said substrate is constantly moved.

14. The method of claim 12, wherein a direction of displacement from said one conditioning position to said one or more other conditioning positions comprises a direction at least partially perpendicular to a direction of movement to load a substrate from the substrate handler on a substrate table, said substrate table adjacent to the substrate handler.

15. The method of claim 12, wherein said substrate floats on a float height of about 0.01-0.15 mm above said support surface during said conditioning process.

16. The method of claim 15, wherein said float height is in a range of about 0.025-0.075 mm above said support surface.

17. The method of claim 12, wherein during displacement of said substrate is on a float height of at least about 0.10 nm.

18. The method of claim 17, wherein said float height is at least about 0.15 nm.

19. The method of claim 18, wherein said float height is at least about 0.20 mm.