Method and device for selective adjustment of hysteresis window

• US 7,576,901 B2
• Filed: 12/17/2007
• Issued: 08/18/2009
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence, Kothari, Manish
• Primary Examiner(s): Ben; Loha
• Application Number:
  US11/958,316
• Publication Number:
  US 20080106784A1
• Time in Patent Office: 610 Days
• Field of Search: 359290-292, 359/295, 359/298, 359/239, 359/250, 359/260, 359/278, 356/450, 356/503, 356/504, 333/105, 333/262, 257/415, 257/417, 257/701, 257/747, 307/401, 372/20, 372/50, 372/96, 345/32, 345/84, 345/85, 345/540, 385/147
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the particular application for which the interferometric modulators are manufactured, the width and location of the hysteresis window may be altered. For example, in some applications, reducing the power required to operate an array of interferometric modulators may be an important consideration. In other applications, the speed of the interferometric modulators may be of more importance, where the speed of an interferometric modulator, as used herein, refers to the speed of actuating and relaxing the moveable mirror. In other applications, the cost and ease of manufacturing may be of most importance. Systems and methods are introduced that allow selection of a width and location of a hysteresis window by adjusting various physical characteristics.

Claims

1. A method of manufacturing an interferometric display element, wherein the interferometric display element comprises a moveable reflective layer, a partially reflective layer, and a dielectric layer positioned between the moveable reflective layer and the partially reflective layer, the moveable reflective layer being suspended away from the partially reflective layer by one or more supports so as to define a cavity between the moveable reflective layer and the dielectric layer, the method comprising:

selecting one or more characteristics of at least one of a support thickness, a support width, a dielectric layer thickness, and a moveable layer width, wherein the selected one or more characteristics define one or more of an actuation threshold, a relax threshold, and a voltage difference between the actuation and relax thresholds of the interferometric display element;

optimizing the one or more characteristics for at least one of low power consumption, speed, and ease of manufacturing of the interferometric display element; and

manufacturing the interferometric display element to include the selected one or more characteristics.

2. The method of claim 1, wherein the selecting one or more characteristics consists of selecting one or more characteristics of at least one of a support thickness, a support width, and a dielectric layer thickness, wherein the selected one or more characteristics define one or more of an actuation threshold, a relax threshold, and a voltage difference between the actuation and relax thresholds of the interferometric display element.

3. A method of manufacturing an interferometric display element, wherein the interferometric display element comprises a moveable reflective layer, a partially reflective layer, and a dielectric layer positioned between the moveable reflective layer and the partially reflective layer, the moveable reflective layer being suspended away from the partially reflective layer by one or more supports so as to define a cavity between the moveable reflective layer and the dielectric layer, the method comprising:

selecting one or more characteristics of at least one of a moveable layer thickness, a moveable layer material, and a moveable layer stress level, wherein the selected one or more characteristics define one or more of an actuation threshold, a relax threshold, and a voltage difference between the actuation and relax thresholds of the interferometric display element;

optimizing the one or more characteristics for at least one of low power consumption, speed, and ease of manufacturing of the interferometric display element; and

manufacturing the interferometric display element to include the selected one or more characteristic.

4. The method of claim 3, wherein selecting one or more characteristics consists of selecting one or more characteristics of at least one of a moveable layer thickness, a moveable layer material, and a moveable layer stress level, wherein the selected one or more characteristics define one or more of an actuation threshold, a relax threshold, and a voltage difference between the actuation and relax thresholds of the interferometric display element.

5. An interferometric modulator optimized for at least one of (a) low power consumption, (b) speed, and (c) ease of manufacturing, comprising:

means for reflecting light, said light reflecting means being moveable between a first state and a second state, said light reflecting means having one or more characteristics selected to define an expected relax threshold and an expected actuation threshold of the interferometric modulator; and

means for defining a gap between the light reflecting means and a dielectric layer, the gap defining means having one or more characteristics selected to define an expected relax threshold and an expected actuation threshold of the interferometric modulator.

6. The interferometric modulator of claim 5, wherein the one or more characteristics of the light reflecting means selected to define an expected relax threshold and an expected actuation threshold of the interferometric modulator comprise at least one of a movable layer width, a moveable layer material, a moveable layer stress level, and a moveable layer thickness.

7. The interferometric modulator of claim 5, wherein the one or more characteristics of the gap defining means selected to define an expected relax threshold and an expected actuation threshold of the interferometric modulator comprise at least one of a support thickness, a support width, and a dielectric layer thickness.

8. The interferometric modulator of claim 5, wherein the light reflecting means comprises a moveable reflective layer.

9. The interferometric modulator of claim 5, wherein the gap defining means comprises a dielectric layer and one or more supports.

11. The interferometric modulator of claim 8, wherein the one or more characteristics comprise at least one of a support thickness, a support width, a dielectric layer thickness, a moveable layer thickness, a moveable layer width, a moveable material, and a moveable layer stress level.

10. An interferometric modulator comprising:

a moveable reflective layer;

an optical stack comprising a partially reflective layer and an electrically conductive layer;

a dielectric material positioned between the moveable reflective layer and the partially reflective layer; and

one or more supports positioned between the moveable reflective layer and the dielectric material and configured to define a gap between the moveable reflective layer and the dielectric layer,

wherein one or more characteristics of the moveable layer, partially reflective layer, electrically conductive layer, dielectric material, and one or more supports are selected to define an expected relax threshold and an expected actuation threshold of the interferometric modulator.

12. A display element comprising:

a reflective moveable layer;

an optical stack comprising a partially reflective layer and a patterned electrically conductive layer;

a dielectric material positioned between the reflective moveable layer and the partially reflective layer; and

supports positioned between the reflective moveable layer and the dielectric material and configured to define a gap between the reflective moveable layer and the partially reflective layer.

13. The display of claim 12, wherein the total surface area of the patterned electrically conductive layer surface is reduced when compared to a continuous electrically conductive layer.

14. The display element of claim 12, wherein the electrically conductive layer is patterned to define at least one hole through the electrically conductive layer.

15. The display of claim 12, wherein the electrically conductive layer is patterned to define a plurality of holes of at least two different sizes.

16. The display of claim 12, wherein the electrically conductive layer is patterned to define a plurality of holes of at least two different shapes.

17. The display element of claim 12, wherein a thickness of the reflective moveable layer is in the range of about 800 to 1,500 Angstroms.

18. The display element of claim 12, wherein a tensile stress of the reflective moveable layer is in the range of about 50 to 350 MPascals.

19. The display element of claim 12, wherein the display element has an actuation threshold in the range of about 7 volts to 9 volts and a relax threshold in the range of about 1 volt to 3 volts.

20. The display element of claim 12, wherein the pattern of the electrically conductive layer defines a central portion electrically isolated from a peripheral portion of the electrically conductive layer.

21. The display element of claim 20, wherein the pattern of the electrically conductive layer defines a circular cut through the electrically conductive layer to electrically isolate the central portion.

22. The display element of claim 20, wherein a surface area of the central portion is about ⅓

of a total surface area of the electrically conductive layer.

23. The display element of claim 20, wherein a thickness of the reflective moveable layer is in the range of about 800 to 1,500 Angstroms.

24. The display element of claim 20, wherein a tensile stress of the reflective moveable layer is in the range of about 50 to 350 MPascals.

25. The display element of claim 20, wherein the display element has an actuation threshold in the range of about 7 volts to 9 volts and a relax threshold in the range of about 1 volt to 3 volts.

26. A method of manufacturing an interferometric modulator to incorporate a selected actuation threshold, the method comprising:

selecting one or more characteristics of an area of an electrically conductive layer in an interferometric modulator to be electrically isolated, wherein selected the one or more characteristics of the electrically isolated area define an expected actuation and relax threshold of the interferometric modulator; and

manufacturing the interferometric modulator by use of the one or more characteristics of the electrically isolated area such that the actuation and relax threshold of the manufactured interferometric modulator is substantially equal to the expected actuation and relax threshold.

27. The method of claim 26, wherein the selected one or more characteristics of an electrically conductive layer to be electrically isolated comprise at least one of size and shape.