Three-wafer channel structure for a fluid analyzer
First Claim
1. A channel structure for a fluid analyzer, comprising:
- a first wafer;
a second wafer situated on the first wafer;
a membrane situated on the second wafer;
a third wafer situated on the membrane;
a stationary phase of the fluid analyzer situated on the membrane;
a first channel situated in the third wafer having an open side facing the stationary phase; and
a second channel situated in the first wafer having an open side facing the membrane.
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Accused Products
Abstract
A three-wafer channel or column structure for a fluid analyzer. The structure may have a support member, membrane, or support wafer containing heaters and interactive elements. The membrane may have a channel of one wafer facing the interactive element side and a space of another wafer facing the other side. The membrane may have perforations to equalize the pressures on both sides of the membrane. A detector in the membrane may have exposure to both the channel and space for good sensitivity, as the sample may be on both sides of the membrane. The wafers may be bonded with a thin film of non-flowing viscous material. Capillaries may be attached to an inlet and outlet of the channel and be parallel to an elongated dimension of the channel.
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Citations
18 Claims
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1. A channel structure for a fluid analyzer, comprising:
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a first wafer; a second wafer situated on the first wafer; a membrane situated on the second wafer; a third wafer situated on the membrane; a stationary phase of the fluid analyzer situated on the membrane; a first channel situated in the third wafer having an open side facing the stationary phase; and a second channel situated in the first wafer having an open side facing the membrane. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A structure for a flow of a fluid for an analyzer, comprising:
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a mid wafer having an opening situated along an elongated dimension of the mid wafer; a support member situated proximate to the opening of the mid wafer and having an elongated dimension approximately parallel to the elongated dimension of the mid wafer; a topcap wafer having a channel along an elongated dimension of the topcap wafer approximately parallel to the elongated dimension of the mid wafer, and the channel having an opening along the elongated dimension of the mid wafer and having the opening of the channel face the support member; and a bottom cap wafer situated proximate to the mid wafer and covering a side of the opening of the mid wafer opposite of the side of the opening of the mid wafer facing the channel of the topcap wafer. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A channel for a fluid analyzer comprising:
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a support wafer; a first cap wafer situated on a first side of the support wafer to form a first channel; and a second cap wafer situated on a second side of the support wafer to form a second channel; and wherein the support wafer has at least one opening between the first channel and the second channel; and further comprising; at least one heater element situated in the support wafer; and at least one interactive element proximate to the at least one heater element.
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16. A channel for a fluid analyzer comprising:
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a support wafer; a first cap wafer situated on a first side of the support wafer to form a first channel; and a second cap wafer situated on a second side of the support wafer to form a second channel; and wherein the support wafer has at least one opening between the first channel and the second channel; and further comprising; a first capillary coupled to an inlet of the first channel; a second capillary coupled to an outlet of the first channel; and wherein the first and second capillaries are aligned approximately parallel to a line crossing the inlet and the outlet of the support wafer.
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17. A channel for a fluid analyzer comprising:
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a support wafer; a first cap wafer situated on a first side of the support wafer to form a first channel; and a second cap wafer situated on a second side of the support wafer to form a second channel; and wherein the support wafer has at least one opening between the first channel and the second channel; and further comprising; at least one heater element situated in the support wafer; at least one interactive element proximate to the at Least one heater element; and a thermal pump, integrated into the first channel, comprising at least one heater element and valve.
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18. A channel for a fluid analyzer comprising:
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a support wafer; a first cap wafer situated on a first side of the support wafer to form a first channel; and a second cap wafer situated on a second side of the support wafer to form a second channel; and wherein the support wafer has at least one opening between the first channel and the second channel; and further comprising; a detector situated in the support wafer; and wherein the detector comprises an element having a sensing exposure on the first side and the second side of the support wafer.
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Specification